Quantum Metrology & Laser Applications

Research output

Research output per year 1971 1996 1997 1998 1999 2000 2001 2004 2005 2006 2007 2008 2009 2010 2011 2012 2013 2014 2015 2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

• 1154 Article
• 167 Conference contribution
• 92 PhD-Thesis - Research and graduation internal
• 29 Chapter
• 71 More
  • 17 Abstract
  • 9 Review article
  • 9 PhD-Thesis – Research external, graduation internal
  • 8 Report
  • 7 Meeting Abstract
  • 4 Paper
  • 3 Comment / Letter to the editor
  • 3 Editorial
  • 3 Erratum / Corrigendum
  • 2 Book
  • 2 Poster
  • 1 Foreword/postscript
  • 1 Short survey
  • 1 Design
  • 1 Patent

Research output per year

Research output per year

Search results

• 2024

  Lissajous Singularities in Young's Interference Experiment

  Miao, W., Visser, T. D. & Gbur, G., 2024, CLEO 2024 Part of Conference on Lasers & Electro-Optics: [Proceedings]. Optica Publishing Group (formerly OSA)

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Beam Focusing 100%
  • Polarization Singularity 100%
  • Singularities 100%
• 2023

  Digital image correction methods using dark-field digital holographic microscopy for semiconductor metrology

  Adhikary, M., Cromwijk, T., Konijnenberg, S., Coene, W., Witte, S., de Boer, J. & den Boef, A., 2023, Proceedings Optica Imaging Congress (3D, COSI, DH, FLatOptics, IS, pcAOP). Optica Publishing Group (formerly OSA)

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Integrated Circuit 100%
  • Feature Size 100%
  • Defects 100%

• First Observation of the 1S-2S Transition of He⁺ in an Atomic Beam

  Barbé, V., Gründeman, E. L., de Velasco, A. M., Roth, C., Collombon, M. & Eikema, K. S. E., 2023, 2023 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference (CLEO/Europe-EQEC): [Proceedings]. Institute of Electrical and Electronics Engineers Inc.

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  Open Access

  File

  • Atomic Beams 100%
  • Quantum Electrodynamics 100%
  • Alpha Radiation 50%
  22 Downloads (Pure)

• Multi-Wavelength Ptychography for Wavefront Sensing

  Pelekanidis, A., Du, M., Liu, X., Zhang, F., Eikema, K. S. E. & Witte, S., 2023, 2023 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference (CLEO/Europe-EQEC): [Proceedings]. Institute of Electrical and Electronics Engineers Inc., 1 p.

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  Open Access

  File

  • Ptychography 100%
  • High Harmonic Generation 100%
  • Wavefront Sensing 100%
  • Harmonic Generation 100%
  • Image Analysis 33%
  5 Downloads (Pure)

• Nonlinear compression of mJ-level pulses via double-pass loose focusing in air

  Zhang, F., Pelekanidis, A., Du, M., Eikema, K. & Witte, S., 2023, 2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC): [Proceedings]. Institute of Electrical and Electronics Engineers Inc., 1 p.

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  Open Access

  File

  • Average Power 100%
  • Ultrashort Pulse 100%
  • High Power Lasers 100%
  • Pulse Rate 100%
  • Narrowband 50%
  11 Downloads (Pure)

• Phase-Controlled Two-Color High-Order Harmonic Generation in Laser-Produced Plasmas

  Mathijssen, J., Eikema, K. S. E. & Witte, S., 2023, 2023 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2023: [Proceedings]. Institute of Electrical and Electronics Engineers Inc., 1 p.

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  Open Access

  File

  • Harmonics 100%
  • Laser Pulse 40%
  • Plasma Property 20%
  • Extreme Ultraviolet Radiation 20%
  • Ultraviolet Emission 20%
  23 Downloads (Pure)

• Surface Modification to Optimize Generation and Detection of Light-Induced Acoustics

  Illienko, M., Sudera, P., Velsink, M. & Witte, S., 2023, 2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC): [Proceedings]. Institute of Electrical and Electronics Engineers Inc., 1 p.

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  Open Access

  File

  • Acoustic Pulse 100%
  • Buried Structure 100%
  • Refractivity 100%
  • Internal Structure 50%
  • Sample Surface 50%
  17 Downloads (Pure)
• 2022

  Fast and Robust Overlay Metrology from Visible to Infrared Wavelengths Using Dark-field Digital Holographic Microscopy

  Messinis, C., Van Schaijk, T. T. M., Pandey, N., Tenner, V. T., Koolen, A., Witte, S., De Boer, J. F. & Den Boef, A. J., 2022, Metrology, Inspection, and Process Control XXXVI. Robinson, J. C. & Sendelbach, M. J. (eds.). SPIE, p. 90-100 11 p. 120530B. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 12053).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Measured Data 100%
  • Feature Size 100%
  • Correction Capability 100%
  • Semiconductor Device 100%

• Generalized Malus' Law and Spatial Coherence Changes by Linear, Azimuthal and Radial Polarizers

  Xu, J., Gbur, G. & Visser, T. D., 2022, Frontiers in Optics, FiO 2022. Optica Publishing Group (formerly OSA), JTu5A.5. (Optics InfoBase Conference Papers).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Coherence 100%

• Generation of 2-micrometer wavelength laser-light to drive euv-emitting plasmas

  Behnke, L., Mostafa, Y. Y., Schupp, R., Bouza, Z., Lassise, A., Bayraktar, M., Sheil, J., Hoekstra, R., Ubachs, W. & Versolato, O. O., 2022, Mid-Infrared Coherent Sources 2022. Optica Publishing Group (formerly OSA), JW5A.8. (Optics InfoBase Conference Papers).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Laser Light 100%
  • Laser System 50%
  • Ultraviolet Light 50%
  • Nanolithography 50%

• High-Order Harmonic Generation in Laser-Produced Aluminium Plasmas

  Mathijssen, J., Mazzotta, Z., Eikema, K. S. E. & Witte, S., 2022, Compact EUV and X-ray Light Sources (EUVXRAY 2022): Proceedings Optica High-brightness Sources and Light-driven Interactions Congress 2022. Optica Publishing Group (formerly OSA), ETh3A.4. (Optics InfoBase Conference Papers).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Harmonics 100%

• High-resolution wavefront sensing of multi-spectral high-harmonic generation sources using ptychography

  Du, M., Liu, X., Pelekanidis, A., Zhang, F., Loetgering, L., Konold, P. E., Porter, C. L., Smorenburg, P., Eikema, K. S. E. & Witte, S., 2022, Computational Optical Sensing and Imaging: Proceedings Imaging and Applied Optics Congress 2022 (3D, AOA, COSI, ISA, pcAOP). Optica Publishing Group (formerly OSA), CF1D.2. (Optics InfoBase Conference Papers).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • High Harmonic Generation 100%
  • Wavefront Sensing 100%
  • High Resolution 100%
  • Ultraviolet Sources 50%
  • Harmonics 50%

• Improving the precision of semiconductor overlay measurements using dark-field digital holographic microscopy

  Adhikary, M., Cromwijk, T., Messinis, C., de Wit, J., Konijnenberg, S., Witte, S., de Boer, J. & den Boef, A. J., 2022, 3D Image Acquisition and Display: Technology, Perception and Applications: Proceedings Imaging and Applied Optics Congress 2022 (3D, AOA, COSI, ISA, pcAOP). Optica Publishing Group (formerly OSA), JTh2A.8. (Optics InfoBase Conference Papers).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Nanometre 100%
  • Feature Size 100%

• Ptychographic characterization of extreme ultraviolet vortex beams

  Pelekanidis, A., Du, M., Liu, X., Zhang, F., Eikema, K. & Witte, S., 2022, Computational Optical Sensing and Imaging: Proceedings Imaging and Applied Optics Congress 2022 (3D, AOA, COSI, ISA, pcAOP). Optica Publishing Group (formerly OSA), CF1D.7. (Optics InfoBase Conference Papers).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • High Harmonic Generation 100%

• Recent Advances in Modeling Laser-Driven EUV Light Source Plasmas for Nanolithography

  Sheil, J., Hemminga, D. J., Basko, M. M., Ubachs, W., Hoekstra, R., Neukirch, A. J., Colgan, J. & Versolato, O. O., 2022, Compact EUV and X-ray Light Sources (EUVXRAY 2022): Proceedings Optica High-brightness Sources and Light-driven Interactions Congress 2022. Optica Publishing Group (formerly OSA), ETh5A.5. (Optics InfoBase Conference Papers).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Light Source 100%
  • Lithography 50%

• Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV

  Versolato, O. O., Schupp, R., Behnke, L., Mostafa, Y. Y., Bouza, Z., Lassise, A., Bayraktar, M., Sheil, J., Hoekstra, R. & Ubachs, W., 2022, Compact EUV and X-ray Light Sources (EUVXRAY 2022): Proceedings Optica High-brightness Sources and Light-driven Interactions Congress 2022. Optica Publishing Group (formerly OSA), ETh5A.7. (Optics InfoBase Conference Papers).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • State Laser 100%
  • Tin 100%
  • Solid-State Laser 100%
  • Solid State Laser 100%
  • Laser Light 50%

• TI-REX: a 5->20ns Temporally Shapeable and 1.4-4.4µm Wavelength-tunable Source for Nanolithography

  Mazzotta, Z., Mathijssen, J., Versolato, O., Eikema, K. & Witte, S., 2022, High Intensity Lasers and High Field Phenomena (HILAS 2022): Proceedings Optica High-brightness Sources and Light-driven Interactions Congress 2022. Optica Publishing Group (formerly OSA), HW2B.2. (Optics InfoBase Conference Papers).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Parametric Amplifier 100%
• 2021

  Tailoring spatial entropy in extreme ultraviolet focused beams for multispectral ptychography

  Liu, X., Loetgering, L., De Beurs, A., Du, M., Konold, P., Eikema, K. & Witte, S., 30 Sept 2021, 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference (CLEO/Europe-EQEC). Institute of Electrical and Electronics Engineers Inc.

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Ptychography 100%
  • Diagnosis 100%
  • Ultraviolet Radiation 100%
  • Wavefront Sensing 100%
  • Phase Contrast Microscopy 100%

• TI-REX: A Tunable Infrared laser for Experiments in nanolithography

  Mazzotta, Z., Mathijssen, J., Eikema, K., Versolato, O. & Witte, S., 30 Sept 2021, 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference (CLEO/Europe-EQEC): [Proceedings]. Institute of Electrical and Electronics Engineers Inc.

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Conversion Efficiency 100%
  • Infrared Laser 100%
  • Nanolithography 100%
  • Solid State Laser 100%
  • Transistor 100%

• Towards High-Order Harmonic Generation in Laser Produced Plasmas

  Mathijssen, J., Eikema, K. & Witte, S., 30 Sept 2021, 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference (CLEO/Europe-EQEC): [Proceedings]. Institute of Electrical and Electronics Engineers Inc.

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Harmonics 100%
  • Laser Pulse 20%
  • Plasma Property 20%
  • Ultraviolet Emission 20%
  • Laser Plasmas 20%

• aPIE: Angle calibration algorithm for reflection ptychography

  de Beurs, A. C. C., Loetgering, L., Herczog, M., Eikema, K. S. E. & Witte, S., 2021, Computational Optical Sensing and Imaging 2021 (COSI): [Proceedings]. OSA - The Optical Society, CW6B.4. (Optics InfoBase Conference Papers).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Ptychography 100%
  • Image Reconstruction 100%
  • Reflection Mode 50%

• Fast and robust diffraction based overlay metrology using dark-field digital holographic microscopy

  van Schaijk, T. T. M., Messinis, C., Pandey, N., Tenner, V. T., Koolen, A., Witte, S., de Boer, J. F. & den Boef, A. J., 2021, Optical Measurement Systems for Industrial Inspection XII. Lehmann, P., Osten, W. & Goncalves, A. A. (eds.). SPIE, 117820O. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 11782).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Electric Field 100%
  • Spectral Range 100%
  • Coherence Length 100%
  • Noise Source 100%
  • Coherence 100%

• Lens aberration calibration and correction with plasmonic nanoparticles in off-axis dark-field digital holographic microscope for semiconductor metrology

  Messinis, C., van Schaijk, T. T. M., Pandey, N., Koolen, A., de Boer, J. F., Witte, S. & den Boef, A. J., 2021, Computational Optical Sensing and Imaging 2021 (COSI): [Proceedings]. OSA - The Optical Society, CF2E.7. (Optics InfoBase Conference Papers).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Plasmonics 100%
  • Point Spread Function 100%
  • Gold Nanoparticles 100%
  • Nanoparticles 100%
  • Nanoparticle 100%

• Propagation of partially coherent beams in longitudinally modulated graded-index fibers

  Wadood, S. A., Liang, K., Agrawal, G. P., Visser, T. D., Stroud, C. R. & Vamivakas, A. N., 2021, Frontiers in Optics, FiO 2021. Optica Publishing Group (formerly OSA), FM2C.3. (Optics InfoBase Conference Papers).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Gaussian Distribution 100%

• Ptychographic optical coherence tomography

  Du, M., Loetgering, L., Eikema, K. S. E. & Witte, S., 2021, Computational Optical Sensing and Imaging 2021 (COSI): [Proceedings]. OSA - The Optical Society, CTu2H.1. (Optics InfoBase Conference Papers).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Optical Coherence Tomography 100%
  • Imaging Technique 50%

• Ptychography-based characterization of wavelength-tunable vortex beams

  Pelekanidis, A., Loetgering, L. & Witte, S., 2021, Computational Optical Sensing and Imaging 2021 (COSI): [Proceedings]. OSA - The Optical Society, CTu6A.1. (Optics InfoBase Conference Papers).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Vortex 100%

• ptyLab: A cross-platform inverse modeling toolbox for conventional and Fourier ptychography

  Loetgering, L., Aidukas, T., Du, M., Flaes, D. B., Penagos, D., Rose, M., Pelekanidis, A., de Beurs, A., Eschen, W., Hess, J., Wilhein, T., Heintzmann, R., Rothhardt, J. & Witte, S., 2021, Computational Optical Sensing and Imaging 2021 (COSI): [Proceedings]. OSA - The Optical Society, CW6B.3. (Optics InfoBase Conference Papers).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Data Analysis 100%
  • Software 100%
  • Pythonidae 100%
  • Cross Pollination 100%
  • Modeling 100%

• Tailoring spatial entropy in extreme ultraviolet focused beams for multispectral ptychography

  Liu, X., Loetgering, L., de Beurs, A., Du, M., Konold, P., Eikema, K. & Witte, S., 2021, Computational Optical Sensing and Imaging 2021 (COSI): [Proceedings]. OSA - The Optical Society, CTu6A.2. (Optics InfoBase Conference Papers).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • High Harmonic Generation 100%
  • Extreme Ultraviolet Radiation 100%
  • Ultraviolet Radiation 100%

• TI-REX: A tunable infrared laser for experiments in nanolithography

  Mazzotta, Z., Mathijssen, J., Eikema, K., Versolato, O. & Witte, S., 2021, The European Conference on Lasers and Electro-Optics 2021 (CLEO): [Proceedings]. OSA - The Optical Society, Cd_p_28. (Optics InfoBase Conference Papers).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Pulse Energy 100%
  • Nanosecond 100%
  • Pulse Shape 100%
  • Infrared Laser 100%
  • Nanolithography 100%

• Towards high-order harmonic generation in laser produced plasmas

  Mathijssen, J., Eikema, K. & Witte, S., 2021, The European Conference on Lasers and Electro-Optics 2021 (CLEO): [Proceedings]. OSA - The Optical Society, Cg_p_10. (Optics InfoBase Conference Papers).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Harmonics 100%
• 2020

  Anomalous coherence changes in radiation and scattering

  Wadood, S. A., Vamivakas, A. N., Schouten, H. F., Fischer, D. G. & Visser, T. D., 2020, Frontiers in Optics 2020: Proceedings Frontiers in Optics / Laser Science, Part of Frontiers in Optics + Laser Science APS/DLS, FiO 2020. OSA - The Optical Society, FW1A.2. (Optics InfoBase Conference Papers).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Coherence 100%

• Controlling the temporal shape of a high-power nanosecond 1064 nm laser pulse to explore EUV generation and different droplet deformation regimes.

  Mazzotta, Z., Meijer, R., Kurilovich, D., Schupp, R., Versolato, O., Eikema, K. S. E. & Witte, S., 2020, Compact EUV and X-ray Light Sources, EUVXRAY 2020: [Proceedings]. OSA - The Optical Society, EM1A.4. (Optics InfoBase Conference Papers).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Laser System 100%
  • Nanosecond 100%
  • Laser Pulse 100%

• Optical parametric chirped pulse amplifier producing ultrashort 10.5 mJ pulses at 1.55 µm

  Mathijssen, J., Faria Pinto, T. D., Schulte, A., Eikema, K. & Witte, S., 2020, High Intensity Lasers and High Field Phenomena 2020: [Proceedings]. OSA - The Optical Society, HF1B.2. (Optics InfoBase Conference Papers).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Fiber Laser 100%

• Parallel acquisition of multiple images using coherence gating in off-axis dark-field digital holographic microscope for semiconductor metrology

  Messinis, C., van Schaijk, T. T. M., Tenner, V. T., de Boer, J. F., Witte, S. & den Boef, A. J., 2020, Proceedings Imaging and Applied Optics Congress: Computational Optical Sensing and Imaging. OSA - The Optical Society, CF4C.6. (Optics InfoBase Conference Papers).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Coherence 100%

• Solid-state-laser-produced microdroplet-Tin plasma sources of extreme ultraviolet radiation

  Behnke, L., Schupp, R., Bouza, Z., Scheers, J., Sheil, J., Hoekstra, R., Ubachs, W. & Versolato, O. O., 2020, Compact EUV and X-ray Light Sources 2020 (EUVXRAY): [Proceedings]. OSA - The Optical Society, EF2A.2. (Optics InfoBase Conference Papers).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Plasma Source 100%
  • State Laser 100%
  • Solid State Laser 100%
  • Extreme Ultraviolet Radiation 100%
  • Tin 100%

• Towards high harmonic generation in laser-produced plasma

  Schulte, A., Mathijssen, J., Eikema, K. & Witte, S., 2020, Compact EUV & X-ray Light Sources 2020. OSA - The Optical Society, ETh3A.4. (Optics InfoBase Conference Papers).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • High Harmonic Generation 100%
  • Harmonics 100%
• 2019

  Paving the way for fundamental physics tests with singly-ionized helium

  Krauth, J. J., Dreissen, L. S., Roth, C., Gründeman, E. L., Collombon, M., Favier, M. & Eikema, K. S. E., 29 Oct 2019, Proceedings of Science PoS (FFK2019)049. arXiv.org, p. 1-10 10 p.

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Helium Ion 100%
  • Quantum Electrodynamics 66%
  • High Harmonic Generation 33%
  • Laser Spectroscopy 33%

• Tests of fundamental physics using ramsey-comb spectroscopy on the hydrogen molecule

  Roth, C., Dreissen, L. S., Grundeman, E. L., Krauth, J. J., Favier, M., Salumbides, E. J., Ubachs, W. & Eikema, K. S. E., 17 Oct 2019, 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference (CLEO/Europe-EQEC) : [Proceedings]. Institute of Electrical and Electronics Engineers Inc., 8872740

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Quantum Electrodynamics 100%

• Rotational diffractive shear interferometry for extreme ultraviolet imaging

  de Beurs, A., Liu, X., Jansen, G. S. M., Eikema, K. S. E. & Witte, S., Jun 2019, Imaging and Applied Optics 2019 (COSI, IS, MATH, pcAOP): Proceedings. OSA - The Optical Society, (Optics InfoBase Conference Papers; vol. Part F170-COSI 2019).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Diffraction 100%
  • Interferometry 100%
  • Ultraviolet Imaging 100%
  • Rotational 100%
  • Image Reconstruction 100%

• Theoretical and experimental demonstration of a state-of-the-art dark-field holographic microscope for advanced semiconductor metrology

  Messinis, C., Tenner, V. T., de Boer, J. F., Witte, S. & den Boef, A. J., Jun 2019, Imaging and Applied Optics 2019 (COSI, IS, MATH, pcAOP): [Proceedings]. OSA - The Optical Society, CTu4C.4. (Optics InfoBase Conference Papers; vol. Part F170-COSI 2019).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Darkness 100%
  • Metrology 100%
  • Semiconductors 100%
  • Fields 100%
  • Semiconductor 100%

• A spectrally resolved single-shot wavefront sensor for broadband high-harmonic generation sources

  Liu, X., Jansen, M., De Beurs, A., Eikema, K. & Witte, S., 2019, 2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC): [Proceedings]. Institute of Electrical and Electronics Engineers Inc., 8872611

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Generation Source 100%
  • Harmonic Generation 100%
  • High Harmonic Generation 100%
  • Experimental Result 25%
  • Ray Radiation 25%

• Characterization of thin metal films by ultrafast laser induced ultrasound

  Zhang, H., Antoncecchi, A., Edward, S., Planken, P. & Witte, S., 2019, 2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC): [Proceedings]. Institute of Electrical and Electronics Engineers Inc., 8871454

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Acoustic Attenuation 100%
  • Acoustic Property 100%

• Comparison of propagation-based and ptychographic phase retrieval

  Loetgering, L., Eikema, K. & Witte, S., 2019, Imaging and Applied Optics 2019 (COSI, IS, MATH, pcAOP): [Proceedings]. OSA - The Optical Society, CW3A.5. (Optics InfoBase Conference Papers; vol. Part F170-COSI 2019).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Wavefront Sensing 100%
  • Phase Contrast 100%

• First demonstration of VUV ramsey-comb excitation based on HHG; Towards 1S-2S He⁺ excitation

  Grundeman, E. L., Dreissen, L. S., Roth, C., Krauth, J. J., Favier, M. & Eikema, K. S. E., 2019, 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference (CLEO/Europe-EQEC): [Proceedings]. Institute of Electrical and Electronics Engineers Inc., 8872201

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Quantum Electrodynamics 100%
  • Laser Spectroscopy 100%
  • Deuterium 100%
  • Hydrogen 100%
  • Atomic Hydrogen 100%

• Ion energy and charge state distribution in Pico- and femtosecond laser-produced plasmas

  De Faria Pinto, T., Bayerle, A., Matthijssen, J., Kurilovich, D., Stodolna, A., Versolato, O., Eikema, K. & Witte, S., 2019, 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference (CLEO/Europe-EQEC): [Proceedings]. IEEE, 8872166. (Conference on Lasers and Electro-Optics Europe (CLEO EUROPE) - Proceedings; vol. 2019).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • YAG Laser 100%
  • Ion Emission 100%

• Ion energy and charge state distribution in Pico- and femtosecond laser-produced plasmas

  De Faria Pinto, T., Bayerle, A., Matthijssen, J., Kurilovich, D., Stodolna, A., Versolato, O., Eikema, K. & Witte, S., 2019, 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference (CLEO/Europe-EQEC): [Proceedings]. OSA - The Optical Society, ee_p_2. (European Quantum Electronics Conference - Proceedings; vol. 2019).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • YAG Laser 100%
  • Ion Emission 100%

• Phase-resolved semiconductor overlay metrology with a dark field holographic microscope

  Tenner, V. T., Messinis, C. & den Boef, A. J., 2019, Proceedings Digital Holography and Three-Dimensional Imaging 2019. Optical Society of America (OSA), DH-2019-M4B.7. (Optics InfoBase Conference Papers).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Limitations 100%
  • Optical Sensors 100%
  • Semiconductor Manufacturing 100%
  • Optical Measuring Instrument 100%
• 2018

  The next generation of laser spectroscopy experiments using light muonic atoms

  Schmidt, S., Willig, M., Haack, J., Horn, R., Adamczak, A., Ahmed, M. A., Amaro, F. D., Amaro, P., Biraben, F., Carvalho, P., Chen, T. L., Fernandes, L. M. P., Graf, T., Guerra, M., Hänsch, T. W., Hildebrandt, M., Huang, Y. C., Indelicato, P., Julien, L. & Kirch, K. & 24 others, Knecht, A., Kottmann, F., Krauth, J. J., Liu, Y. W., Machado, J., Marszalek, M., Monteiro, C. M. B., Nez, F., Nuber, J., Patel, D. N., Rapisarda, E., Dos Santos, J. M. F., Santos, J. P., Silva, P. A. O. C., Sinkunaite, L., Shy, J. T., Schuhmann, K., Schulthess, I., Taqqu, D., Veloso, J. F. C. A., Wang, L. B., Zeyen, M., Antognini, A. & Pohl, R., 21 Dec 2018, The next generation of laser spectroscopy experiments using light muonic atoms. 1 ed. Vol. 1138. (Journal of Physics: Conference Series).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  Open Access

  • Nuclear Structure 100%
  • Laser Spectroscopy 100%
  • Quantum Electrodynamics 50%
  • Helium Isotope 50%

• Spectrally-resolved, single-shot wavefront sensing of broadband high-harmonic sources

  Jansen, G. S. M., Freisem, L., Rudolf, D., Eikema, K. S. E. & Witte, S., 6 Aug 2018, Proceedings Conference on Lasers and Electro-Optics: CLEO: Science and Innovations 2018. OSA - The Optical Society, STh3N.4. (Optics InfoBase Conference Papers; vol. Part F94-CLEO_SI 2018).

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Wavefront Sensing 100%
  • Harmonics 100%

• Cavitation-induced expansion dynamics of tin microdroplet target in EUV light sources

  Kurilovich, D., Pinto, T., Schupp, R., Torretti, F., Scheers, J., Stodolna, A., Eikema, K. S., Witte, S., Ubachs, W., Hoekstra, R. & Versolato, O. O., 26 Mar 2018, Compact EUV and X-ray Light Sources 2018: Proceedings High-Brightness Sources and Light-driven Interactions Part of High-brightness Sources and Light-driven Interactions. OSA - The Optical Society, JT4A.2

  Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

  • Good Agreement 100%
  • Nanolithography 100%
  • Dynamic Models 100%
  • Light Source 100%
  • Dynamics 100%