aPIE: an angle calibration algorithm for reflection ptychography

Anne de Beurs, Lars Loetgering, Milan Herczog, Mengqi Du, Kjeld S.E. Eikema, Stefan Witte*

*Corresponding author for this work

Research output: Contribution to JournalArticleAcademicpeer-review

Abstract

Reflection ptychography is a lensfree microscopy technique particularly promising in regions of the electromagnetic spectrum where imaging optics are inefficient or not available. This is the case in tabletop extreme ultraviolet microscopy and grazing incidence small angle x ray scattering experiments. Combining such experimental configurations with ptychography requires accurate knowledge of the relative tilt between the sample and the detector in non-coplanar scattering geometries. Here, we describe an algorithm for tilt estimation in reflection ptychography. The method is verified experimentally, enabling sample tilt determination within a fraction of a degree. Furthermore, the angle-estimation uncertainty and reconstruction quality are studied for both smooth and highly structured beams.

Original languageEnglish
Pages (from-to)1949-1952
Number of pages4
JournalOptics Letters
Volume47
Issue number8
Early online date6 Apr 2022
DOIs
Publication statusPublished - 15 Apr 2022

Bibliographical note

Funding Information:
European Research Council (ERC-CoG 864016); Nederlandse Organisatie voor Wetenschappelijk Onderzoek (HTSM 13934).

Publisher Copyright:
© 2022 Optica Publishing Group.

Funding

European Research Council (ERC-CoG 864016); Nederlandse Organisatie voor Wetenschappelijk Onderzoek (HTSM 13934).

FundersFunder number
Horizon 2020 Framework Programme864016
European Research Council
Nederlandse Organisatie voor Wetenschappelijk OnderzoekHTSM 13934

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