Abstract
We present a new fabrication method to carve fiber-top cantilevers from single-mode optical fibers. The procedure, which is entirely based on a two-step femtosecond laser micromachining technique, is faster and more convenient with respect to what has been reported so far in the literature, and should be well adaptable to automatization and, thus, to series production. © 2008 IOP Publishing Ltd.
Original language | English |
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Journal | Journal of Micromechanics and Microengineering |
Volume | 18 |
Issue number | 3 |
DOIs | |
Publication status | Published - 2008 |