Cavitation-induced expansion dynamics of tin microdroplet target in EUV light sources

Dmitry Kurilovich; Tiago Pinto; Ruben Schupp; Francesco Torretti; Joris Scheers; Aneta Stodolna; Kjeld S. Eikema; Stefan Witte; Wim Ubachs; Ronnie Hoekstra; Oscar O. Versolato

doi:10.1364/EUVXRAY.2018.JT4A.2

Cavitation-induced expansion dynamics of tin microdroplet target in EUV light sources

Dmitry Kurilovich^*, Tiago Pinto, Ruben Schupp, Francesco Torretti, Joris Scheers, Aneta Stodolna, Kjeld S. Eikema, Stefan Witte, Wim Ubachs, Ronnie Hoekstra, Oscar O. Versolato

^*Corresponding author for this work

Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

Abstract

Laser-induced cavitation in tin microdroplets can be used to obtain optimized laser targets in EUV sources for nanolithography. We present our experimental analysis of microdroplet expansion and find good agreement with a fluid dynamics model.

Original language	English
Title of host publication	Compact EUV and X-ray Light Sources 2018
Subtitle of host publication	Proceedings High-Brightness Sources and Light-driven Interactions Part of High-brightness Sources and Light-driven Interactions
Publisher	OSA - The Optical Society
ISBN (Electronic)	9781557528209
ISBN (Print)	9781943580408
DOIs	https://doi.org/10.1364/EUVXRAY.2018.JT4A.2
Publication status	Published - 26 Mar 2018
Event	Compact EUV and X-ray Light Sources, EUVXRAY 2018 - Strasbourg, France Duration: 26 Mar 2017 → 28 Mar 2017

Conference

Conference	Compact EUV and X-ray Light Sources, EUVXRAY 2018
Country/Territory	France
City	Strasbourg
Period	26/03/17 → 28/03/17

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1364/EUVXRAY.2018.JT4A.2

Handle.net

Persistent link

Cite this

Kurilovich, D., Pinto, T., Schupp, R., Torretti, F., Scheers, J., Stodolna, A., Eikema, K. S., Witte, S., Ubachs, W., Hoekstra, R., & Versolato, O. O. (2018). Cavitation-induced expansion dynamics of tin microdroplet target in EUV light sources. In Compact EUV and X-ray Light Sources 2018: Proceedings High-Brightness Sources and Light-driven Interactions Part of High-brightness Sources and Light-driven Interactions [JT4A.2] OSA - The Optical Society. https://doi.org/10.1364/EUVXRAY.2018.JT4A.2

@inproceedings{8bff4759fa6b464eb54e5dd116fb58cb,

title = "Cavitation-induced expansion dynamics of tin microdroplet target in EUV light sources",

abstract = "Laser-induced cavitation in tin microdroplets can be used to obtain optimized laser targets in EUV sources for nanolithography. We present our experimental analysis of microdroplet expansion and find good agreement with a fluid dynamics model.",

author = "Dmitry Kurilovich and Tiago Pinto and Ruben Schupp and Francesco Torretti and Joris Scheers and Aneta Stodolna and Eikema, {Kjeld S.} and Stefan Witte and Wim Ubachs and Ronnie Hoekstra and Versolato, {Oscar O.}",

year = "2018",

month = mar,

day = "26",

doi = "10.1364/EUVXRAY.2018.JT4A.2",

language = "English",

isbn = "9781943580408",

booktitle = "Compact EUV and X-ray Light Sources 2018",

publisher = "OSA - The Optical Society",

note = "Compact EUV and X-ray Light Sources, EUVXRAY 2018 ; Conference date: 26-03-2017 Through 28-03-2017",

}

Kurilovich, D, Pinto, T, Schupp, R, Torretti, F, Scheers, J, Stodolna, A, Eikema, KS , Witte, S , Ubachs, W, Hoekstra, R & Versolato, OO 2018, Cavitation-induced expansion dynamics of tin microdroplet target in EUV light sources. in Compact EUV and X-ray Light Sources 2018: Proceedings High-Brightness Sources and Light-driven Interactions Part of High-brightness Sources and Light-driven Interactions., JT4A.2, OSA - The Optical Society, Compact EUV and X-ray Light Sources, EUVXRAY 2018, Strasbourg, France, 26/03/17. https://doi.org/10.1364/EUVXRAY.2018.JT4A.2

Cavitation-induced expansion dynamics of tin microdroplet target in EUV light sources. / Kurilovich, Dmitry; Pinto, Tiago; Schupp, Ruben et al.

Compact EUV and X-ray Light Sources 2018: Proceedings High-Brightness Sources and Light-driven Interactions Part of High-brightness Sources and Light-driven Interactions. OSA - The Optical Society, 2018. JT4A.2.

Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Cavitation-induced expansion dynamics of tin microdroplet target in EUV light sources

AU - Kurilovich, Dmitry

AU - Pinto, Tiago

AU - Schupp, Ruben

AU - Torretti, Francesco

AU - Scheers, Joris

AU - Stodolna, Aneta

AU - Eikema, Kjeld S.

AU - Witte, Stefan

AU - Ubachs, Wim

AU - Hoekstra, Ronnie

AU - Versolato, Oscar O.

PY - 2018/3/26

Y1 - 2018/3/26

N2 - Laser-induced cavitation in tin microdroplets can be used to obtain optimized laser targets in EUV sources for nanolithography. We present our experimental analysis of microdroplet expansion and find good agreement with a fluid dynamics model.

AB - Laser-induced cavitation in tin microdroplets can be used to obtain optimized laser targets in EUV sources for nanolithography. We present our experimental analysis of microdroplet expansion and find good agreement with a fluid dynamics model.

UR - http://www.scopus.com/inward/record.url?scp=85047112197&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85047112197&partnerID=8YFLogxK

U2 - 10.1364/EUVXRAY.2018.JT4A.2

DO - 10.1364/EUVXRAY.2018.JT4A.2

M3 - Conference contribution

AN - SCOPUS:85047112197

SN - 9781943580408

BT - Compact EUV and X-ray Light Sources 2018

PB - OSA - The Optical Society

T2 - Compact EUV and X-ray Light Sources, EUVXRAY 2018

Y2 - 26 March 2017 through 28 March 2017

ER -

Kurilovich D, Pinto T, Schupp R, Torretti F, Scheers J, Stodolna A et al. Cavitation-induced expansion dynamics of tin microdroplet target in EUV light sources. In Compact EUV and X-ray Light Sources 2018: Proceedings High-Brightness Sources and Light-driven Interactions Part of High-brightness Sources and Light-driven Interactions. OSA - The Optical Society. 2018. JT4A.2 doi: 10.1364/EUVXRAY.2018.JT4A.2

Cavitation-induced expansion dynamics of tin microdroplet target in EUV light sources

Abstract

Conference

UN SDGs

Access to Document

Handle.net

Other files and links

Fingerprint

Cite this