Cavitation-induced expansion dynamics of tin microdroplet target in EUV light sources

Dmitry Kurilovich*, Tiago Pinto, Ruben Schupp, Francesco Torretti, Joris Scheers, Aneta Stodolna, Kjeld S. Eikema, Stefan Witte, Wim Ubachs, Ronnie Hoekstra, Oscar O. Versolato

*Corresponding author for this work

Research output: Chapter in Book / Report / Conference proceedingConference contributionAcademicpeer-review

Abstract

Laser-induced cavitation in tin microdroplets can be used to obtain optimized laser targets in EUV sources for nanolithography. We present our experimental analysis of microdroplet expansion and find good agreement with a fluid dynamics model.

Original languageEnglish
Title of host publicationCompact EUV and X-ray Light Sources, EUVXRAY 2018
PublisherOSA - The Optical Society
VolumePart F85-EUVXRAY 2018
ISBN (Electronic)9781557528209
ISBN (Print)978-1-943580-40-8
DOIs
Publication statusPublished - Mar 2018
EventCompact EUV and X-ray Light Sources, EUVXRAY 2018 - Strasbourg, France
Duration: 26 Mar 201728 Mar 2017

Conference

ConferenceCompact EUV and X-ray Light Sources, EUVXRAY 2018
CountryFrance
CityStrasbourg
Period26/03/1728/03/17

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    Kurilovich, D., Pinto, T., Schupp, R., Torretti, F., Scheers, J., Stodolna, A., Eikema, K. S., Witte, S., Ubachs, W., Hoekstra, R., & Versolato, O. O. (2018). Cavitation-induced expansion dynamics of tin microdroplet target in EUV light sources. In Compact EUV and X-ray Light Sources, EUVXRAY 2018 (Vol. Part F85-EUVXRAY 2018). OSA - The Optical Society. https://doi.org/10.1364/EUVXRAY.2018.JT4A.2