Cavitation-induced expansion dynamics of tin microdroplet target in EUV light sources

Dmitry Kurilovich*, Tiago Pinto, Ruben Schupp, Francesco Torretti, Joris Scheers, Aneta Stodolna, Kjeld S. Eikema, Stefan Witte, Wim Ubachs, Ronnie Hoekstra, Oscar O. Versolato

*Corresponding author for this work

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Engineering & Materials Science

Chemical Compounds