CoBIT Spectroscopy of Mo and y ions relevant to beyond EUV source development

E. Sokell, S. Ali, J. Sheil, H. Kato, N. Nakamura

Research output: Contribution to JournalArticleAcademicpeer-review

Abstract

Synopsis A CoBIT has been used to produce Mo and Y ions and EUV spectra have been recorded. The data indicate that the CoBIT spectra are significantly different to laser-produced plasma emission spectra for similar ion stages. This difference is attributed to the different number density of electrons in the two kinds of plasmas.
Original languageEnglish
Article number052045
Number of pages1
JournalJournal of Physics : Conference Series
Volume875
Issue number6
Early online date18 Aug 2017
DOIs
Publication statusPublished - 2017
Externally publishedYes
Event30th International Conference on Photonic, Electronic, and Atomic Collisions, ICPEAC 2017 - Cairns, Australia
Duration: 26 Jul 20171 Aug 2017

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