CoBIT Spectroscopy of Mo and y ions relevant to beyond EUV source development

E. Sokell, S. Ali, J. Sheil, H. Kato, N. Nakamura

Research output: Chapter in Book / Report / Conference proceedingConference contributionAcademicpeer-review

Abstract

Synopsis A CoBIT has been used to produce Mo and Y ions and EUV spectra have been recorded. The data indicate that the CoBIT spectra are significantly different to laser-produced plasma emission spectra for similar ion stages. This difference is attributed to the different number density of electrons in the two kinds of plasmas.
Original languageEnglish
Title of host publicationXXX International Conference on Photonic, Electronic, and Atomic Collisions, ICPEAC 2017 - Leptons - Atom/Ion
EditorsA. Kheifets, S. Hodgman, A. Bray, J. Machacek
PublisherInstitute of Physics Publishing
Volume875
DOIs
Publication statusPublished - 18 Aug 2017
Externally publishedYes
Event30th International Conference on Photonic, Electronic, and Atomic Collisions, ICPEAC 2017 - Cairns, Australia
Duration: 26 Jul 20171 Aug 2017

Publication series

NameJournal of Physics: Conference Series
ISSN (Print)1742-6588
ISSN (Electronic)1742-6596

Conference

Conference30th International Conference on Photonic, Electronic, and Atomic Collisions, ICPEAC 2017
Country/TerritoryAustralia
CityCairns
Period26/07/171/08/17

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