CoBIT Spectroscopy of Mo and y ions relevant to beyond EUV source development

E. Sokell; S. Ali; J. Sheil; H. Kato; N. Nakamura

doi:10.1088/1742-6596/875/6/052045

CoBIT Spectroscopy of Mo and y ions relevant to beyond EUV source development

E. Sokell, S. Ali, J. Sheil, H. Kato, N. Nakamura

Research output: Contribution to Journal › Article › Academic › peer-review

Abstract

Synopsis A CoBIT has been used to produce Mo and Y ions and EUV spectra have been recorded. The data indicate that the CoBIT spectra are significantly different to laser-produced plasma emission spectra for similar ion stages. This difference is attributed to the different number density of electrons in the two kinds of plasmas.

Original language	English
Article number	052045
Number of pages	1
Journal	Journal of Physics : Conference Series
Volume	875
Issue number	6
Early online date	18 Aug 2017
DOIs	https://doi.org/10.1088/1742-6596/875/6/052045
Publication status	Published - 2017
Externally published	Yes
Event	30th International Conference on Photonic, Electronic, and Atomic Collisions, ICPEAC 2017 - Cairns, Australia Duration: 26 Jul 2017 → 1 Aug 2017

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10.1088/1742-6596/875/6/052045Licence: CC BY

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title = "CoBIT Spectroscopy of Mo and y ions relevant to beyond EUV source development",

abstract = "Synopsis A CoBIT has been used to produce Mo and Y ions and EUV spectra have been recorded. The data indicate that the CoBIT spectra are significantly different to laser-produced plasma emission spectra for similar ion stages. This difference is attributed to the different number density of electrons in the two kinds of plasmas.",

author = "E. Sokell and S. Ali and J. Sheil and H. Kato and N. Nakamura",

year = "2017",

doi = "10.1088/1742-6596/875/6/052045",

language = "English",

volume = "875",

journal = "Journal of Physics : Conference Series",

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TY - JOUR

T1 - CoBIT Spectroscopy of Mo and y ions relevant to beyond EUV source development

AU - Sokell, E.

AU - Ali, S.

AU - Sheil, J.

AU - Kato, H.

AU - Nakamura, N.

PY - 2017

Y1 - 2017

N2 - Synopsis A CoBIT has been used to produce Mo and Y ions and EUV spectra have been recorded. The data indicate that the CoBIT spectra are significantly different to laser-produced plasma emission spectra for similar ion stages. This difference is attributed to the different number density of electrons in the two kinds of plasmas.

AB - Synopsis A CoBIT has been used to produce Mo and Y ions and EUV spectra have been recorded. The data indicate that the CoBIT spectra are significantly different to laser-produced plasma emission spectra for similar ion stages. This difference is attributed to the different number density of electrons in the two kinds of plasmas.

U2 - 10.1088/1742-6596/875/6/052045

DO - 10.1088/1742-6596/875/6/052045

M3 - Article

SN - 1742-6588

VL - 875

JO - Journal of Physics : Conference Series

JF - Journal of Physics : Conference Series

IS - 6

M1 - 052045

T2 - 30th International Conference on Photonic, Electronic, and Atomic Collisions, ICPEAC 2017

Y2 - 26 July 2017 through 1 August 2017

ER -

CoBIT Spectroscopy of Mo and y ions relevant to beyond EUV source development

Abstract

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