Cylindrically and non-cylindrically symmetric expansion dynamics of tin microdroplets after ultrashort laser pulse impact

Tiago de Faria Pinto; Jan Mathijssen; Randy Meijer; Hao Zhang; Alex Bayerle; Dmitry Kurilovich; Oscar O. Versolato; Kjeld S.E. Eikema; Stefan Witte

doi:10.1007/s00339-020-04207-9

Cylindrically and non-cylindrically symmetric expansion dynamics of tin microdroplets after ultrashort laser pulse impact

Tiago de Faria Pinto, Jan Mathijssen, Randy Meijer, Hao Zhang, Alex Bayerle, Dmitry Kurilovich, Oscar O. Versolato, Kjeld S.E. Eikema, Stefan Witte^*

^*Corresponding author for this work

Research output: Contribution to Journal › Article › Academic › peer-review

Abstract

In this work, the expansion dynamics of liquid tin micro-droplets irradiated by femtosecond laser pulses were investigated. The effects of laser pulse duration, energy, and polarization on ablation, cavitation, and spallation dynamics were studied using laser pulse durations ranging from 220 fs to 10 ps, with energies ranging from 1 to 5 mJ, for micro-droplets with an initial radius of 15 and 23 μ m. Using linearly polarized laser pulses, cylindrically asymmetric shock waves were produced, leading to novel non-symmetric target shapes, the asymmetry of which was studied as a function of laser pulse parameters and droplet size. A good qualitative agreement was obtained between smoothed-particle hydrodynamics simulations and high-resolution stroboscopic experimental data of the droplet deformation dynamics.

Original language	English
Article number	93
Pages (from-to)	1-10
Number of pages	10
Journal	Applied Physics A: Materials Science and Processing
Volume	127
Issue number	2
Early online date	12 Jan 2021
DOIs	https://doi.org/10.1007/s00339-020-04207-9
Publication status	Published - Feb 2021

Funding

This work was conducted at the Advanced Research Center for Nanolithography, a public-private partnership between the University of Amsterdam, Vrije Universiteit Amsterdam, the Netherlands Organization for Scientific Research (NWO), and the semiconductor-equipment manufacturer ASML.

Keywords

Extreme ultraviolet
Hydrodynamics
Tin
Ultrashort lasers

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This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1007/s00339-020-04207-9

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de Faria Pinto, T., Mathijssen, J., Meijer, R., Zhang, H., Bayerle, A., Kurilovich, D., Versolato, O. O., Eikema, K. S. E., & Witte, S. (2021). Cylindrically and non-cylindrically symmetric expansion dynamics of tin microdroplets after ultrashort laser pulse impact. Applied Physics A: Materials Science and Processing, 127(2), 1-10. Article 93. https://doi.org/10.1007/s00339-020-04207-9

@article{f49f3b78852a4cf2b69fa1cd001b2dc0,

title = "Cylindrically and non-cylindrically symmetric expansion dynamics of tin microdroplets after ultrashort laser pulse impact",

abstract = "In this work, the expansion dynamics of liquid tin micro-droplets irradiated by femtosecond laser pulses were investigated. The effects of laser pulse duration, energy, and polarization on ablation, cavitation, and spallation dynamics were studied using laser pulse durations ranging from 220 fs to 10 ps, with energies ranging from 1 to 5 mJ, for micro-droplets with an initial radius of 15 and 23 μ m. Using linearly polarized laser pulses, cylindrically asymmetric shock waves were produced, leading to novel non-symmetric target shapes, the asymmetry of which was studied as a function of laser pulse parameters and droplet size. A good qualitative agreement was obtained between smoothed-particle hydrodynamics simulations and high-resolution stroboscopic experimental data of the droplet deformation dynamics.",

keywords = "Extreme ultraviolet, Hydrodynamics, Tin, Ultrashort lasers",

author = "\{de Faria Pinto\}, Tiago and Jan Mathijssen and Randy Meijer and Hao Zhang and Alex Bayerle and Dmitry Kurilovich and Versolato, \{Oscar O.\} and Eikema, \{Kjeld S.E.\} and Stefan Witte",

year = "2021",

month = feb,

doi = "10.1007/s00339-020-04207-9",

language = "English",

volume = "127",

pages = "1--10",

journal = "Applied Physics A: Materials Science and Processing",

issn = "0947-8396",

publisher = "Springer Heidelberg",

number = "2",

}

de Faria Pinto, T, Mathijssen, J, Meijer, R, Zhang, H, Bayerle, A, Kurilovich, D, Versolato, OO , Eikema, KSE & Witte, S 2021, 'Cylindrically and non-cylindrically symmetric expansion dynamics of tin microdroplets after ultrashort laser pulse impact', Applied Physics A: Materials Science and Processing, vol. 127, no. 2, 93, pp. 1-10. https://doi.org/10.1007/s00339-020-04207-9

TY - JOUR

T1 - Cylindrically and non-cylindrically symmetric expansion dynamics of tin microdroplets after ultrashort laser pulse impact

AU - de Faria Pinto, Tiago

AU - Mathijssen, Jan

AU - Meijer, Randy

AU - Zhang, Hao

AU - Bayerle, Alex

AU - Kurilovich, Dmitry

AU - Versolato, Oscar O.

AU - Eikema, Kjeld S.E.

AU - Witte, Stefan

PY - 2021/2

Y1 - 2021/2

N2 - In this work, the expansion dynamics of liquid tin micro-droplets irradiated by femtosecond laser pulses were investigated. The effects of laser pulse duration, energy, and polarization on ablation, cavitation, and spallation dynamics were studied using laser pulse durations ranging from 220 fs to 10 ps, with energies ranging from 1 to 5 mJ, for micro-droplets with an initial radius of 15 and 23 μ m. Using linearly polarized laser pulses, cylindrically asymmetric shock waves were produced, leading to novel non-symmetric target shapes, the asymmetry of which was studied as a function of laser pulse parameters and droplet size. A good qualitative agreement was obtained between smoothed-particle hydrodynamics simulations and high-resolution stroboscopic experimental data of the droplet deformation dynamics.

AB - In this work, the expansion dynamics of liquid tin micro-droplets irradiated by femtosecond laser pulses were investigated. The effects of laser pulse duration, energy, and polarization on ablation, cavitation, and spallation dynamics were studied using laser pulse durations ranging from 220 fs to 10 ps, with energies ranging from 1 to 5 mJ, for micro-droplets with an initial radius of 15 and 23 μ m. Using linearly polarized laser pulses, cylindrically asymmetric shock waves were produced, leading to novel non-symmetric target shapes, the asymmetry of which was studied as a function of laser pulse parameters and droplet size. A good qualitative agreement was obtained between smoothed-particle hydrodynamics simulations and high-resolution stroboscopic experimental data of the droplet deformation dynamics.

KW - Extreme ultraviolet

KW - Hydrodynamics

KW - Tin

KW - Ultrashort lasers

UR - https://www.scopus.com/pages/publications/85099264489

UR - https://www.scopus.com/inward/citedby.url?scp=85099264489&partnerID=8YFLogxK

U2 - 10.1007/s00339-020-04207-9

DO - 10.1007/s00339-020-04207-9

M3 - Article

AN - SCOPUS:85099264489

SN - 0947-8396

VL - 127

SP - 1

EP - 10

JO - Applied Physics A: Materials Science and Processing

JF - Applied Physics A: Materials Science and Processing

IS - 2

M1 - 93

ER -

Cylindrically and non-cylindrically symmetric expansion dynamics of tin microdroplets after ultrashort laser pulse impact

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