Abstract
We present a miniaturized photoacoustic (PA) spectrometer obtained by carving a micromachined flexural pressure transducer directly at the top of a glass ferrule. The ferrule is equipped with two optical fibers, one for laser excitation of the gas and one for interferometric readout of the transducer. To demonstrate the working principle and assess the sensitivity of the device, we performed a set of measurements of C
Original language | English |
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Pages (from-to) | 1672-1674 |
Journal | Optics Letters |
Volume | 38 |
Issue number | 10 |
DOIs | |
Publication status | Published - 2013 |