Efficient Generation of Extreme Ultraviolet Light From Nd:YAG-Driven Microdroplet-Tin Plasma

R. Schupp, F. Torretti, R. A. Meijer, M. Bayraktar, J. Scheers, D. Kurilovich, A. Bayerle, K. S. E. Eikema, S. Witte, W. Ubachs, R. Hoekstra, O. O. Versolato

Research output: Contribution to JournalArticleAcademicpeer-review

Abstract

We experimentally investigate the emission of EUV light from a mass-limited laser-produced plasma over a wide parameter range by varying the diameter of the targeted tin microdroplets and the pulse duration and energy of the 1-μm-wavelength Nd:YAG drive laser. Combining spectroscopic data with absolute measurements of the emission into the 2% bandwidth around 13.5 nm relevant for nanolithographic applications, the plasma’s efficiency in radiating EUV light is quantified. All observed dependencies of this radiative efficiency on the experimental parameters are successfully captured in a geometrical model featuring the plasma absorption length as the primary parameter. It is found that laser intensity is the pertinent parameter setting the plasma temperature and the tin-ion charge-state distribution when varying laser pulse energy and duration over almost 2 orders of magnitude. These insights enabled us to obtain a record-high 3.2% conversion efficiency of laser light into 13.5-nm radiation and to identify paths towards obtaining even higher efficiencies with 1-μm solid-state lasers that may rival those of current state-of-the-art CO2-laser-driven sources.
Original languageEnglish
Article number014010
JournalPhysical Review Applied
Volume12
Issue number1
DOIs
Publication statusPublished - 8 Jul 2019

Cite this

@article{d0b4e66e28964719a7112076b1933dee,
title = "Efficient Generation of Extreme Ultraviolet Light From Nd:YAG-Driven Microdroplet-Tin Plasma",
abstract = "We experimentally investigate the emission of EUV light from a mass-limited laser-produced plasma over a wide parameter range by varying the diameter of the targeted tin microdroplets and the pulse duration and energy of the 1-μm-wavelength Nd:YAG drive laser. Combining spectroscopic data with absolute measurements of the emission into the 2{\%} bandwidth around 13.5 nm relevant for nanolithographic applications, the plasma’s efficiency in radiating EUV light is quantified. All observed dependencies of this radiative efficiency on the experimental parameters are successfully captured in a geometrical model featuring the plasma absorption length as the primary parameter. It is found that laser intensity is the pertinent parameter setting the plasma temperature and the tin-ion charge-state distribution when varying laser pulse energy and duration over almost 2 orders of magnitude. These insights enabled us to obtain a record-high 3.2{\%} conversion efficiency of laser light into 13.5-nm radiation and to identify paths towards obtaining even higher efficiencies with 1-μm solid-state lasers that may rival those of current state-of-the-art CO2-laser-driven sources.",
author = "R. Schupp and F. Torretti and Meijer, {R. A.} and M. Bayraktar and J. Scheers and D. Kurilovich and A. Bayerle and Eikema, {K. S. E.} and S. Witte and W. Ubachs and R. Hoekstra and Versolato, {O. O.}",
year = "2019",
month = "7",
day = "8",
doi = "10.1103/PhysRevApplied.12.014010",
language = "English",
volume = "12",
journal = "Physical Review Applied",
issn = "2331-7019",
publisher = "American Physical Society",
number = "1",

}

Efficient Generation of Extreme Ultraviolet Light From Nd:YAG-Driven Microdroplet-Tin Plasma. / Schupp, R.; Torretti, F.; Meijer, R. A.; Bayraktar, M.; Scheers, J.; Kurilovich, D.; Bayerle, A.; Eikema, K. S. E.; Witte, S.; Ubachs, W.; Hoekstra, R.; Versolato, O. O.

In: Physical Review Applied, Vol. 12, No. 1, 014010, 08.07.2019.

Research output: Contribution to JournalArticleAcademicpeer-review

TY - JOUR

T1 - Efficient Generation of Extreme Ultraviolet Light From Nd:YAG-Driven Microdroplet-Tin Plasma

AU - Schupp, R.

AU - Torretti, F.

AU - Meijer, R. A.

AU - Bayraktar, M.

AU - Scheers, J.

AU - Kurilovich, D.

AU - Bayerle, A.

AU - Eikema, K. S. E.

AU - Witte, S.

AU - Ubachs, W.

AU - Hoekstra, R.

AU - Versolato, O. O.

PY - 2019/7/8

Y1 - 2019/7/8

N2 - We experimentally investigate the emission of EUV light from a mass-limited laser-produced plasma over a wide parameter range by varying the diameter of the targeted tin microdroplets and the pulse duration and energy of the 1-μm-wavelength Nd:YAG drive laser. Combining spectroscopic data with absolute measurements of the emission into the 2% bandwidth around 13.5 nm relevant for nanolithographic applications, the plasma’s efficiency in radiating EUV light is quantified. All observed dependencies of this radiative efficiency on the experimental parameters are successfully captured in a geometrical model featuring the plasma absorption length as the primary parameter. It is found that laser intensity is the pertinent parameter setting the plasma temperature and the tin-ion charge-state distribution when varying laser pulse energy and duration over almost 2 orders of magnitude. These insights enabled us to obtain a record-high 3.2% conversion efficiency of laser light into 13.5-nm radiation and to identify paths towards obtaining even higher efficiencies with 1-μm solid-state lasers that may rival those of current state-of-the-art CO2-laser-driven sources.

AB - We experimentally investigate the emission of EUV light from a mass-limited laser-produced plasma over a wide parameter range by varying the diameter of the targeted tin microdroplets and the pulse duration and energy of the 1-μm-wavelength Nd:YAG drive laser. Combining spectroscopic data with absolute measurements of the emission into the 2% bandwidth around 13.5 nm relevant for nanolithographic applications, the plasma’s efficiency in radiating EUV light is quantified. All observed dependencies of this radiative efficiency on the experimental parameters are successfully captured in a geometrical model featuring the plasma absorption length as the primary parameter. It is found that laser intensity is the pertinent parameter setting the plasma temperature and the tin-ion charge-state distribution when varying laser pulse energy and duration over almost 2 orders of magnitude. These insights enabled us to obtain a record-high 3.2% conversion efficiency of laser light into 13.5-nm radiation and to identify paths towards obtaining even higher efficiencies with 1-μm solid-state lasers that may rival those of current state-of-the-art CO2-laser-driven sources.

U2 - 10.1103/PhysRevApplied.12.014010

DO - 10.1103/PhysRevApplied.12.014010

M3 - Article

VL - 12

JO - Physical Review Applied

JF - Physical Review Applied

SN - 2331-7019

IS - 1

M1 - 014010

ER -