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Enhancement of extreme ultraviolet emission from laser irradiated targets by surface nanostructures

  • E.F. Barte
  • , R. Lokasani
  • , J. Proska
  • , L. Maresova
  • , D. Kos
  • , O. Maguire
  • , G. Joseph
  • , J. Sheil
  • , F. O'Reilly
  • , T. McCormack
  • , E. Sokell
  • , G. O'Sullivan
  • , J. Limpouch
  • , P. Dunne

Research output: Contribution to JournalArticleAcademicpeer-review

Abstract

The effects of shape and thickness of a tin surface layer and of the energy of a 170 ps neodymium:yttrium-Aluminum-garnet laser pulse on the conversion efficiency (CE) into extreme ultraviolet emission in the 13.5 nm region is investigated. Whereas a CE of up to 1.16% into the 2% reflection band of multilayer Mo/Si optics was measured for a bulk Sn target at a laser energy of 25 mJ, significant CE enhancement up to 1.49% is demonstrated for a 200-nm-Thick Sn layer on a microstructured porous alumina substrate.
Original languageEnglish
Pages (from-to)574-578
Number of pages5
JournalLaser and Particle Beams
Volume35
Issue number4
Early online date11 Sept 2017
DOIs
Publication statusPublished - Dec 2017
Externally publishedYes

Bibliographical note

Copyright © Cambridge University Press 2017.

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