Experimental and Numerical Assessment of the Multi-physics Dynamic Response for a MEMS Accelerometer at Various Gaps

Raffaele Ardito; Biagio De Masi; Fabrizio Cerini; Marco Ferrari; Vittorio Ferrari; Alfio Russo; Mikel Azpeitia Urquia; R. Sedmik

doi:10.1016/j.proeng.2016.11.318

Experimental and Numerical Assessment of the Multi-physics Dynamic Response for a MEMS Accelerometer at Various Gaps

Raffaele Ardito^*
, Biagio De Masi
, Fabrizio Cerini
, Marco Ferrari
, Vittorio Ferrari
, Alfio Russo
, Mikel Azpeitia Urquia
, R. Sedmik

^*Corresponding author for this work

Research output: Contribution to Journal › Article › Academic › peer-review

Abstract

The dynamic response of a MEMS accelerometer can be influenced by several multi-physics effects, especially if the gaps between the shuttle and the stator attain sub-micrometric values. The present paper aims at tackling the aforementioned issues by means of a suitable experimental procedure, which has been purposely devised for the problem at hand, and through the execution of numerical analyses (based on the Finite Element Model). The effect of parasitic electrostatic forces and hydrodynamic forces is clearly demonstrated.

Original language	English
Pages (from-to)	971-974
Number of pages	4
Journal	Procedia Engineering
Volume	168
DOIs	https://doi.org/10.1016/j.proeng.2016.11.318
Publication status	Published - 2016

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

Keywords

capacitive MEMS
dynamical characterization
electro-mechanical modelling
finite element simulations
interaction forces

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10.1016/j.proeng.2016.11.318

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title = "Experimental and Numerical Assessment of the Multi-physics Dynamic Response for a MEMS Accelerometer at Various Gaps",

abstract = "The dynamic response of a MEMS accelerometer can be influenced by several multi-physics effects, especially if the gaps between the shuttle and the stator attain sub-micrometric values. The present paper aims at tackling the aforementioned issues by means of a suitable experimental procedure, which has been purposely devised for the problem at hand, and through the execution of numerical analyses (based on the Finite Element Model). The effect of parasitic electrostatic forces and hydrodynamic forces is clearly demonstrated.",

keywords = "capacitive MEMS, dynamical characterization, electro-mechanical modelling, finite element simulations, interaction forces",

author = "Raffaele Ardito and \{De Masi\}, Biagio and Fabrizio Cerini and Marco Ferrari and Vittorio Ferrari and Alfio Russo and Urquia, \{Mikel Azpeitia\} and R. Sedmik",

year = "2016",

doi = "10.1016/j.proeng.2016.11.318",

language = "English",

volume = "168",

pages = "971--974",

journal = "Procedia Engineering",

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T1 - Experimental and Numerical Assessment of the Multi-physics Dynamic Response for a MEMS Accelerometer at Various Gaps

AU - Ardito, Raffaele

AU - De Masi, Biagio

AU - Cerini, Fabrizio

AU - Ferrari, Marco

AU - Ferrari, Vittorio

AU - Russo, Alfio

AU - Urquia, Mikel Azpeitia

AU - Sedmik, R.

PY - 2016

Y1 - 2016

N2 - The dynamic response of a MEMS accelerometer can be influenced by several multi-physics effects, especially if the gaps between the shuttle and the stator attain sub-micrometric values. The present paper aims at tackling the aforementioned issues by means of a suitable experimental procedure, which has been purposely devised for the problem at hand, and through the execution of numerical analyses (based on the Finite Element Model). The effect of parasitic electrostatic forces and hydrodynamic forces is clearly demonstrated.

AB - The dynamic response of a MEMS accelerometer can be influenced by several multi-physics effects, especially if the gaps between the shuttle and the stator attain sub-micrometric values. The present paper aims at tackling the aforementioned issues by means of a suitable experimental procedure, which has been purposely devised for the problem at hand, and through the execution of numerical analyses (based on the Finite Element Model). The effect of parasitic electrostatic forces and hydrodynamic forces is clearly demonstrated.

KW - capacitive MEMS

KW - dynamical characterization

KW - electro-mechanical modelling

KW - finite element simulations

KW - interaction forces

UR - https://www.scopus.com/pages/publications/85009958123

UR - https://www.scopus.com/pages/publications/85009958123#tab=citedBy

U2 - 10.1016/j.proeng.2016.11.318

DO - 10.1016/j.proeng.2016.11.318

M3 - Article

AN - SCOPUS:85009958123

SN - 1877-7058

VL - 168

SP - 971

EP - 974

JO - Procedia Engineering

JF - Procedia Engineering

ER -

Experimental and Numerical Assessment of the Multi-physics Dynamic Response for a MEMS Accelerometer at Various Gaps

Abstract

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Keywords

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