Ferrule-top micromachined devices: design, fabrication, performance

G.L. Gruca; M.J. Slaman; J.H. Rector; D. Iannuzzi

doi:10.1088/0957-0233/21/9/094033

Ferrule-top micromachined devices: design, fabrication, performance

G.L. Gruca, M.J. Slaman, J.H. Rector, D. Iannuzzi

Research output: Contribution to Journal › Article › Academic › peer-review

Abstract

We present a new all-optical micromachined device obtained by carving a rectangular mechanical beam out of the end of a ferruled optical fiber. The device is fabricated with techniques that adapt well to series production and offers performance similar to that provided by fiber-top cantilevers, with the advantage of a much lower production cost. © 2010 IOP Publishing Ltd.

Original language	English
Journal	Measurement Science and Technology
Volume	21
Issue number	9
DOIs	https://doi.org/10.1088/0957-0233/21/9/094033
Publication status	Published - 2010

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10.1088/0957-0233/21/9/094033

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abstract = "We present a new all-optical micromachined device obtained by carving a rectangular mechanical beam out of the end of a ferruled optical fiber. The device is fabricated with techniques that adapt well to series production and offers performance similar to that provided by fiber-top cantilevers, with the advantage of a much lower production cost. {\textcopyright} 2010 IOP Publishing Ltd.",

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AU - Slaman, M.J.

AU - Rector, J.H.

AU - Iannuzzi, D.

PY - 2010

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AB - We present a new all-optical micromachined device obtained by carving a rectangular mechanical beam out of the end of a ferruled optical fiber. The device is fabricated with techniques that adapt well to series production and offers performance similar to that provided by fiber-top cantilevers, with the advantage of a much lower production cost. © 2010 IOP Publishing Ltd.

U2 - 10.1088/0957-0233/21/9/094033

DO - 10.1088/0957-0233/21/9/094033

M3 - Article

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VL - 21

JO - Measurement Science and Technology

JF - Measurement Science and Technology

IS - 9

ER -

Ferrule-top micromachined devices: design, fabrication, performance

Abstract

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