Fiber-top cantilevers: a new generation of micromachined sensors for multipurpose applications

D. Iannuzzi, S. Deladi, H. Schreuders, M.J. Slaman, J.H. Rector, M. C. Elwenspoek

Research output: Chapter in Book / Report / Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publication18th International Optical Fiber Sensor Conference technical Digest
Place of PublicationWashington DC
PublisherOptical Society of America
Publication statusPublished - 2010

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