Abstract
To support the development of miniaturized photoacoustic gas sensors, a fully coupled finite element model for a frequency response simulation of cantilever-based photoacoustic gas sensors is introduced in this paper. The model covers the whole photoacoustic process from radiation absorption to pressure transducer vibration, and considers viscous damping loss. After validation with experimental data, the model was further applied to evaluate the possibility of further optimization and miniaturization of a previously reported sensor design.
| Original language | English |
|---|---|
| Article number | 4772 |
| Pages (from-to) | 1-10 |
| Number of pages | 10 |
| Journal | Sensors (Switzerland) |
| Volume | 19 |
| Issue number | 21 |
| DOIs | |
| Publication status | Published - 2 Nov 2019 |
Funding
Funding: This work was supported by European Research Council (ERC) (Grant No. LASERLAB-EUROPE (Grant No. 654148).
| Funders | Funder number |
|---|---|
| Laserlab-Europe | |
| Seventh Framework Programme | 615170, 654148 |
| European Research Council |
Keywords
- COMSOL
- Photo acoustic spectroscopy
- Sensor miniaturization
- Viscous damping