High-energy Nd: YAG laser system with arbitrary sub-nanosecond pulse shaping capability

R. A. Meijer, A. S. Stodolna, K. S.E. Eikema, S. Witte*

*Corresponding author for this work

Research output: Contribution to JournalArticleAcademicpeer-review

Abstract

We report on a laser system capable of generating high-energy (>270 mJ) temporally shaped pulses at 1064 nm with 0.43-ns shaping resolution. The pulses are generated by modulation of a continuous-wave seed laser and subsequent amplification by a dual-stage grazing-incidence Nd:YVO4 “bounce” amplifier and a Nd:YAG power amplifier (all quasi-continuous diode-pumped). The system produces pulses with a high-quality top-hat spatial beam profile with up to 0.6 GW of peak power and 44 W of average power, a power stability of 0.22% rms, and fully programmable complex temporal shapes.

Original languageEnglish
Pages (from-to)2758-2761
Number of pages4
JournalOptics Letters
Volume42
Issue number14
DOIs
Publication statusPublished - 15 Jul 2017

Funding

This work has been carried out at the Advanced Research Center for Nanolithography (ARCNL); a public-private partnership of the Universiteit van Amsterdam (UvA); the Vrije Universiteit Amsterdam (VU); the Nederlandse Organisatie voor Wetenschappelijk Onderzoek (NWO); and the Semiconductor Equipment Manufacturer ASML.

FundersFunder number
Semiconductor Equipment Manufacturer ASML
Nederlandse Organisatie voor Wetenschappelijk Onderzoek

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