Abstract
We report on a laser system capable of generating high-energy (>270 mJ) temporally shaped pulses at 1064 nm with 0.43-ns shaping resolution. The pulses are generated by modulation of a continuous-wave seed laser and subsequent amplification by a dual-stage grazing-incidence Nd:YVO4 “bounce” amplifier and a Nd:YAG power amplifier (all quasi-continuous diode-pumped). The system produces pulses with a high-quality top-hat spatial beam profile with up to 0.6 GW of peak power and 44 W of average power, a power stability of 0.22% rms, and fully programmable complex temporal shapes.
| Original language | English |
|---|---|
| Pages (from-to) | 2758-2761 |
| Number of pages | 4 |
| Journal | Optics Letters |
| Volume | 42 |
| Issue number | 14 |
| DOIs | |
| Publication status | Published - 15 Jul 2017 |
Funding
This work has been carried out at the Advanced Research Center for Nanolithography (ARCNL); a public-private partnership of the Universiteit van Amsterdam (UvA); the Vrije Universiteit Amsterdam (VU); the Nederlandse Organisatie voor Wetenschappelijk Onderzoek (NWO); and the Semiconductor Equipment Manufacturer ASML.
| Funders | Funder number |
|---|---|
| Semiconductor Equipment Manufacturer ASML | |
| Nederlandse Organisatie voor Wetenschappelijk Onderzoek |
