Highly Efficient 13.5 nm Light Generation Using 2 µm Laser Driven Tin Plasma

Y. Mostafa; L. Behnke; D. J. Engels; Z. Bouza; J. Sheil; W. Ubachs; O. O. Versolato

doi:10.1364/EUVXRAY.2024.ETu5A.3

Highly Efficient 13.5 nm Light Generation Using 2 µm Laser Driven Tin Plasma

Y. Mostafa
, L. Behnke
, D. J. Engels
, Z. Bouza
, J. Sheil
, W. Ubachs
, O. O. Versolato

Research output: Contribution to Conference › Paper › Academic

Abstract

We demonstrate highly efficient 2 µm-wavelength laser-produced plasma light sources for nanolithographic applications, reaching efficiencies of up to 5%.

Original language	English
DOIs	https://doi.org/10.1364/EUVXRAY.2024.ETu5A.3
Publication status	Published - 2024
Event	Compact EUV and X-Ray Light Sources, EUVXRAY 2024 - Part of Optica High-Brightness Sources and Light-Driven Interactions Congress - Vienna, Austria Duration: 12 Mar 2024 → 14 Mar 2024

Conference

Conference	Compact EUV and X-Ray Light Sources, EUVXRAY 2024 - Part of Optica High-Brightness Sources and Light-Driven Interactions Congress
Country/Territory	Austria
City	Vienna
Period	12/03/24 → 14/03/24

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© Optica 2024

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10.1364/EUVXRAY.2024.ETu5A.3

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Mostafa, Y., Behnke, L., Engels, D. J., Bouza, Z., Sheil, J., Ubachs, W., & Versolato, O. O. (2024). Highly Efficient 13.5 nm Light Generation Using 2 µm Laser Driven Tin Plasma. Paper presented at Compact EUV and X-Ray Light Sources, EUVXRAY 2024 - Part of Optica High-Brightness Sources and Light-Driven Interactions Congress, Vienna, Austria. https://doi.org/10.1364/EUVXRAY.2024.ETu5A.3

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title = "Highly Efficient 13.5 nm Light Generation Using 2 µm Laser Driven Tin Plasma",

abstract = "We demonstrate highly efficient 2 µm-wavelength laser-produced plasma light sources for nanolithographic applications, reaching efficiencies of up to 5\%.",

author = "Y. Mostafa and L. Behnke and Engels, \{D. J.\} and Z. Bouza and J. Sheil and W. Ubachs and Versolato, \{O. O.\}",

note = "Publisher Copyright: {\textcopyright} Optica 2024; Compact EUV and X-Ray Light Sources, EUVXRAY 2024 - Part of Optica High-Brightness Sources and Light-Driven Interactions Congress ; Conference date: 12-03-2024 Through 14-03-2024",

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}

Mostafa, Y, Behnke, L, Engels, DJ, Bouza, Z, Sheil, J , Ubachs, W & Versolato, OO 2024, 'Highly Efficient 13.5 nm Light Generation Using 2 µm Laser Driven Tin Plasma', Paper presented at Compact EUV and X-Ray Light Sources, EUVXRAY 2024 - Part of Optica High-Brightness Sources and Light-Driven Interactions Congress, Vienna, Austria, 12/03/24 - 14/03/24. https://doi.org/10.1364/EUVXRAY.2024.ETu5A.3

TY - CONF

T1 - Highly Efficient 13.5 nm Light Generation Using 2 µm Laser Driven Tin Plasma

AU - Mostafa, Y.

AU - Behnke, L.

AU - Engels, D. J.

AU - Bouza, Z.

AU - Sheil, J.

AU - Ubachs, W.

AU - Versolato, O. O.

PY - 2024

Y1 - 2024

N2 - We demonstrate highly efficient 2 µm-wavelength laser-produced plasma light sources for nanolithographic applications, reaching efficiencies of up to 5%.

AB - We demonstrate highly efficient 2 µm-wavelength laser-produced plasma light sources for nanolithographic applications, reaching efficiencies of up to 5%.

UR - https://www.scopus.com/pages/publications/85205089824

UR - https://www.scopus.com/pages/publications/85205089824#tab=citedBy

U2 - 10.1364/EUVXRAY.2024.ETu5A.3

DO - 10.1364/EUVXRAY.2024.ETu5A.3

M3 - Paper

AN - SCOPUS:85205089824

T2 - Compact EUV and X-Ray Light Sources, EUVXRAY 2024 - Part of Optica High-Brightness Sources and Light-Driven Interactions Congress

Y2 - 12 March 2024 through 14 March 2024

ER -

Highly Efficient 13.5 nm Light Generation Using 2 µm Laser Driven Tin Plasma

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