Abstract
We present dark-field d igital h olographic m icroscopy f or diffraction-based overlay metrology in semiconductor layers with feature size of a few nanometers. We aim for higher accuracy and precision by calibrating the illumination profile on the targets.
Original language | English |
---|---|
Title of host publication | 3D Image Acquisition and Display: Technology, Perception and Applications |
Subtitle of host publication | Proceedings Imaging and Applied Optics Congress 2022 (3D, AOA, COSI, ISA, pcAOP) |
Publisher | Optica Publishing Group (formerly OSA) |
ISBN (Electronic) | 9781557528209 |
DOIs | |
Publication status | Published - 2022 |
Event | Computational Optical Sensing and Imaging, COSI 2022 - Vancouver, Canada Duration: 11 Jul 2022 → 15 Jul 2022 |
Publication series
Name | Optics InfoBase Conference Papers |
---|
Conference
Conference | Computational Optical Sensing and Imaging, COSI 2022 |
---|---|
Country/Territory | Canada |
City | Vancouver |
Period | 11/07/22 → 15/07/22 |
Bibliographical note
Publisher Copyright:© 2022 The Author(s)