Improving the precision of semiconductor overlay measurements using dark-field digital holographic microscopy

M. Adhikary; T. Cromwijk; C. Messinis; J. de Wit; S. Konijnenberg; S. Witte; J. de Boer; A. J. den Boef

doi:10.1364/3D.2022.JTh2A.8

Improving the precision of semiconductor overlay measurements using dark-field digital holographic microscopy

M. Adhikary
, T. Cromwijk
, C. Messinis
, J. de Wit
, S. Konijnenberg
, S. Witte
, J. de Boer
, A. J. den Boef

Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

Abstract

We present dark-field d igital h olographic m icroscopy f or diffraction-based overlay metrology in semiconductor layers with feature size of a few nanometers. We aim for higher accuracy and precision by calibrating the illumination profile on the targets.

Original language	English
Title of host publication	3D Image Acquisition and Display: Technology, Perception and Applications
Subtitle of host publication	Proceedings Imaging and Applied Optics Congress 2022 (3D, AOA, COSI, ISA, pcAOP)
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Electronic)	9781557528209
DOIs	https://doi.org/10.1364/3D.2022.JTh2A.8
Publication status	Published - 2022
Event	Computational Optical Sensing and Imaging, COSI 2022 - Vancouver, Canada Duration: 11 Jul 2022 → 15 Jul 2022

Publication series

Name	Optics InfoBase Conference Papers

Conference

Conference	Computational Optical Sensing and Imaging, COSI 2022
Country/Territory	Canada
City	Vancouver
Period	11/07/22 → 15/07/22

Bibliographical note

Publisher Copyright:
© 2022 The Author(s)

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 6 Clean Water and Sanitation

Access to Document

10.1364/3D.2022.JTh2A.8

https://opg.optica.org/abstract.cfm?uri=3D-2022-JTh2A.8

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Adhikary, M., Cromwijk, T., Messinis, C., de Wit, J., Konijnenberg, S., Witte, S., de Boer, J., & den Boef, A. J. (2022). Improving the precision of semiconductor overlay measurements using dark-field digital holographic microscopy. In 3D Image Acquisition and Display: Technology, Perception and Applications: Proceedings Imaging and Applied Optics Congress 2022 (3D, AOA, COSI, ISA, pcAOP) Article JTh2A.8 (Optics InfoBase Conference Papers). Optica Publishing Group (formerly OSA). https://doi.org/10.1364/3D.2022.JTh2A.8

Adhikary, M. ; Cromwijk, T. ; Messinis, C. et al. / Improving the precision of semiconductor overlay measurements using dark-field digital holographic microscopy. 3D Image Acquisition and Display: Technology, Perception and Applications: Proceedings Imaging and Applied Optics Congress 2022 (3D, AOA, COSI, ISA, pcAOP). Optica Publishing Group (formerly OSA), 2022. (Optics InfoBase Conference Papers).

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title = "Improving the precision of semiconductor overlay measurements using dark-field digital holographic microscopy",

abstract = "We present dark-field d igital h olographic m icroscopy f or diffraction-based overlay metrology in semiconductor layers with feature size of a few nanometers. We aim for higher accuracy and precision by calibrating the illumination profile on the targets.",

author = "M. Adhikary and T. Cromwijk and C. Messinis and \{de Wit\}, J. and S. Konijnenberg and S. Witte and \{de Boer\}, J. and \{den Boef\}, \{A. J.\}",

note = "Publisher Copyright: {\textcopyright} 2022 The Author(s); Computational Optical Sensing and Imaging, COSI 2022 ; Conference date: 11-07-2022 Through 15-07-2022",

year = "2022",

doi = "10.1364/3D.2022.JTh2A.8",

language = "English",

series = "Optics InfoBase Conference Papers",

publisher = "Optica Publishing Group (formerly OSA)",

booktitle = "3D Image Acquisition and Display: Technology, Perception and Applications",

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Adhikary, M, Cromwijk, T, Messinis, C, de Wit, J, Konijnenberg, S, Witte, S , de Boer, J & den Boef, AJ 2022, Improving the precision of semiconductor overlay measurements using dark-field digital holographic microscopy. in 3D Image Acquisition and Display: Technology, Perception and Applications: Proceedings Imaging and Applied Optics Congress 2022 (3D, AOA, COSI, ISA, pcAOP)., JTh2A.8, Optics InfoBase Conference Papers, Optica Publishing Group (formerly OSA), Computational Optical Sensing and Imaging, COSI 2022, Vancouver, Canada, 11/07/22. https://doi.org/10.1364/3D.2022.JTh2A.8

Improving the precision of semiconductor overlay measurements using dark-field digital holographic microscopy. / Adhikary, M.; Cromwijk, T.; Messinis, C. et al.
3D Image Acquisition and Display: Technology, Perception and Applications: Proceedings Imaging and Applied Optics Congress 2022 (3D, AOA, COSI, ISA, pcAOP). Optica Publishing Group (formerly OSA), 2022. JTh2A.8 (Optics InfoBase Conference Papers).

Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Improving the precision of semiconductor overlay measurements using dark-field digital holographic microscopy

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AU - Messinis, C.

AU - de Wit, J.

AU - Konijnenberg, S.

AU - Witte, S.

AU - de Boer, J.

AU - den Boef, A. J.

PY - 2022

Y1 - 2022

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AB - We present dark-field d igital h olographic m icroscopy f or diffraction-based overlay metrology in semiconductor layers with feature size of a few nanometers. We aim for higher accuracy and precision by calibrating the illumination profile on the targets.

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M3 - Conference contribution

AN - SCOPUS:85139108781

T3 - Optics InfoBase Conference Papers

BT - 3D Image Acquisition and Display: Technology, Perception and Applications

PB - Optica Publishing Group (formerly OSA)

T2 - Computational Optical Sensing and Imaging, COSI 2022

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ER -

Adhikary M, Cromwijk T, Messinis C, de Wit J, Konijnenberg S, Witte S et al. Improving the precision of semiconductor overlay measurements using dark-field digital holographic microscopy. In 3D Image Acquisition and Display: Technology, Perception and Applications: Proceedings Imaging and Applied Optics Congress 2022 (3D, AOA, COSI, ISA, pcAOP). Optica Publishing Group (formerly OSA). 2022. JTh2A.8. (Optics InfoBase Conference Papers). Epub 2022 Jul 11. doi: 10.1364/3D.2022.JTh2A.8

Improving the precision of semiconductor overlay measurements using dark-field digital holographic microscopy

Abstract

Publication series

Conference

Bibliographical note

UN SDGs

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Persistent URL (handle)

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