Investigation of the effects of hydrodynamic and parasitic electrostatic forces on the dynamics of a high aspect ratio MEMS accelerometer

F. Cerini; M. Ferrari; V. Ferrari; A. Russo; M. Azpeitia Urquia; R. Ardito; B. De Masi; A. Almasi; D. Iannuzzi; R. Sedmik

doi:10.1016/j.proeng.2014.11.279

Investigation of the effects of hydrodynamic and parasitic electrostatic forces on the dynamics of a high aspect ratio MEMS accelerometer

F. Cerini, M. Ferrari, V. Ferrari, A. Russo, M. Azpeitia Urquia, R. Ardito, B. De Masi, A. Almasi, D. Iannuzzi, R. Sedmik

Research output: Contribution to Journal › Article › Academic › peer-review

Abstract

We present the results of an extensive characterization of physical and electrostatic effects influencing the dynamical behavior of a micro-electromechanical (MEMS) accelerometer based on commercial technology. A similar device has been utilized recently to demonstrate the effect of Casimir and other nano-scale interactions on the pull-in distance [Ardito et. al., Microelectron. Reliab., 52 (2012) 271]. In the present work, we focus on the influence of pressure, plate separation, and electric surface potentials on the spectral mechanical response. We finally find evidence for the presence of non-viscous damping due to compressibility of the ambient gas, and demonstrate a strong dependence of the sensitivity on the parameters of the operating point.

Original language	English
Pages (from-to)	827
Journal	Procedia Engineering
Volume	2014
Issue number	87
DOIs	https://doi.org/10.1016/j.proeng.2014.11.279
Publication status	Published - 2014

Bibliographical note

Proceedings title: EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers
Publisher: Elsevier

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10.1016/j.proeng.2014.11.279

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title = "Investigation of the effects of hydrodynamic and parasitic electrostatic forces on the dynamics of a high aspect ratio MEMS accelerometer",

abstract = "We present the results of an extensive characterization of physical and electrostatic effects influencing the dynamical behavior of a micro-electromechanical (MEMS) accelerometer based on commercial technology. A similar device has been utilized recently to demonstrate the effect of Casimir and other nano-scale interactions on the pull-in distance [Ardito et. al., Microelectron. Reliab., 52 (2012) 271]. In the present work, we focus on the influence of pressure, plate separation, and electric surface potentials on the spectral mechanical response. We finally find evidence for the presence of non-viscous damping due to compressibility of the ambient gas, and demonstrate a strong dependence of the sensitivity on the parameters of the operating point.",

author = "F. Cerini and M. Ferrari and V. Ferrari and A. Russo and {Azpeitia Urquia}, M. and R. Ardito and {De Masi}, B. and A. Almasi and D. Iannuzzi and R. Sedmik",

note = "Proceedings title: EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers Publisher: Elsevier",

year = "2014",

doi = "10.1016/j.proeng.2014.11.279",

language = "English",

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TY - JOUR

T1 - Investigation of the effects of hydrodynamic and parasitic electrostatic forces on the dynamics of a high aspect ratio MEMS accelerometer

AU - Cerini, F.

AU - Ferrari, M.

AU - Ferrari, V.

AU - Russo, A.

AU - Azpeitia Urquia, M.

AU - Ardito, R.

AU - De Masi, B.

AU - Almasi, A.

AU - Iannuzzi, D.

AU - Sedmik, R.

N1 - Proceedings title: EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers Publisher: Elsevier

PY - 2014

Y1 - 2014

N2 - We present the results of an extensive characterization of physical and electrostatic effects influencing the dynamical behavior of a micro-electromechanical (MEMS) accelerometer based on commercial technology. A similar device has been utilized recently to demonstrate the effect of Casimir and other nano-scale interactions on the pull-in distance [Ardito et. al., Microelectron. Reliab., 52 (2012) 271]. In the present work, we focus on the influence of pressure, plate separation, and electric surface potentials on the spectral mechanical response. We finally find evidence for the presence of non-viscous damping due to compressibility of the ambient gas, and demonstrate a strong dependence of the sensitivity on the parameters of the operating point.

AB - We present the results of an extensive characterization of physical and electrostatic effects influencing the dynamical behavior of a micro-electromechanical (MEMS) accelerometer based on commercial technology. A similar device has been utilized recently to demonstrate the effect of Casimir and other nano-scale interactions on the pull-in distance [Ardito et. al., Microelectron. Reliab., 52 (2012) 271]. In the present work, we focus on the influence of pressure, plate separation, and electric surface potentials on the spectral mechanical response. We finally find evidence for the presence of non-viscous damping due to compressibility of the ambient gas, and demonstrate a strong dependence of the sensitivity on the parameters of the operating point.

U2 - 10.1016/j.proeng.2014.11.279

DO - 10.1016/j.proeng.2014.11.279

M3 - Article

SN - 1877-7058

VL - 2014

SP - 827

JO - Procedia Engineering

JF - Procedia Engineering

IS - 87

ER -

Investigation of the effects of hydrodynamic and parasitic electrostatic forces on the dynamics of a high aspect ratio MEMS accelerometer

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