Investigation of the effects of hydrodynamic and parasitic electrostatic forces on the dynamics of a high aspect ratio MEMS accelerometer

F. Cerini, M. Ferrari, V. Ferrari, A. Russo, M. Azpeitia Urquia, R. Ardito, B. De Masi, A. Almasi, D. Iannuzzi, R. Sedmik

Research output: Contribution to JournalArticleAcademicpeer-review

Abstract

We present the results of an extensive characterization of physical and electrostatic effects influencing the dynamical behavior of a micro-electromechanical (MEMS) accelerometer based on commercial technology. A similar device has been utilized recently to demonstrate the effect of Casimir and other nano-scale interactions on the pull-in distance [Ardito et. al., Microelectron. Reliab., 52 (2012) 271]. In the present work, we focus on the influence of pressure, plate separation, and electric surface potentials on the spectral mechanical response. We finally find evidence for the presence of non-viscous damping due to compressibility of the ambient gas, and demonstrate a strong dependence of the sensitivity on the parameters of the operating point.
Original languageEnglish
Pages (from-to)827
JournalProcedia Engineering
Volume2014
Issue number87
DOIs
Publication statusPublished - 2014

Bibliographical note

Proceedings title: EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers
Publisher: Elsevier

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