We present the results of an extensive characterization of physical and electrostatic effects influencing the dynamical behavior of a micro-electromechanical (MEMS) accelerometer based on commercial technology. A similar device has been utilized recently to demonstrate the effect of Casimir and other nano-scale interactions on the pull-in distance [Ardito et. al., Microelectron. Reliab., 52 (2012) 271]. In the present work, we focus on the influence of pressure, plate separation, and electric surface potentials on the spectral mechanical response. We finally find evidence for the presence of non-viscous damping due to compressibility of the ambient gas, and demonstrate a strong dependence of the sensitivity on the parameters of the operating point.
Bibliographical noteProceedings title: EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers
Cerini, F., Ferrari, M., Ferrari, V., Russo, A., Azpeitia Urquia, M., Ardito, R., ... Sedmik, R. (2014). Investigation of the effects of hydrodynamic and parasitic electrostatic forces on the dynamics of a high aspect ratio MEMS accelerometer. Procedia Engineering, 2014(87), 827. https://doi.org/10.1016/j.proeng.2014.11.279