Original language | English |
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Qualification | PhD |
Awarding Institution |
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Supervisors/Advisors |
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Award date | 4 Apr 2019 |
Print ISBNs | 9789492323279 |
Publication status | Published - 2019 |
Keywords
- plasma physics; laser physics; fluid dynamics; droplet; pre-pulse; ARCNL; EUV; tin; liquid metal; nanolithography