Laser-induced dynamics of liquid tin microdroplets

D. Kurilovich

Research output: PhD ThesisPhD-Thesis - Research and graduation internal

328 Downloads (Pure)
Original languageEnglish
QualificationPhD
Awarding Institution
  • Vrije Universiteit Amsterdam
Supervisors/Advisors
  • Ubachs, WMG, Supervisor
  • Hoekstra, R.A., Supervisor, External person
  • Versolato, Oscar, Co-supervisor
Award date4 Apr 2019
Print ISBNs9789492323279
Publication statusPublished - 2019

Keywords

  • plasma physics; laser physics; fluid dynamics; droplet; pre-pulse; ARCNL; EUV; tin; liquid metal; nanolithography

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