Lens aberration calibration and correction with plasmonic nanoparticles in off-axis dark-field digital holographic microscope for semiconductor metrology

C. Messinis*, T. T.M. van Schaijk, N. Pandey, A. Koolen, J. F. de Boer, S. Witte, A. J. den Boef

*Corresponding author for this work

Research output: Chapter in Book / Report / Conference proceedingConference contributionAcademicpeer-review

Abstract

We present a method to calibrate and correct lens aberrations in dark-field Digital Holographic Microscope (df-DHM). In this method a gold nanoparticle is used to measure the point-spread function (PSF) of the df-DHM.

Original languageEnglish
Title of host publicationComputational Optical Sensing and Imaging 2021 (COSI)
Subtitle of host publication[Proceedings]
PublisherOSA - The Optical Society
ISBN (Electronic)9781943580897
Publication statusPublished - 2021
EventComputational Optical Sensing and Imaging, COSI 2021 - Part of OSA Imaging and Applied Optics Congress 2021 - Virtual, Online, United States
Duration: 19 Jul 202123 Jul 2021

Publication series

NameOptics InfoBase Conference Papers

Conference

ConferenceComputational Optical Sensing and Imaging, COSI 2021 - Part of OSA Imaging and Applied Optics Congress 2021
Country/TerritoryUnited States
CityVirtual, Online
Period19/07/2123/07/21

Bibliographical note

Publisher Copyright:
© OSA 2021, © 2021 The Author(s)

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