Lens aberration calibration and correction with plasmonic nanoparticles in off-axis dark-field digital holographic microscope for semiconductor metrology

C. Messinis; T. T.M. van Schaijk; N. Pandey; A. Koolen; J. F. de Boer; S. Witte; A. J. den Boef

Lens aberration calibration and correction with plasmonic nanoparticles in off-axis dark-field digital holographic microscope for semiconductor metrology

C. Messinis^*, T. T.M. van Schaijk, N. Pandey, A. Koolen, J. F. de Boer, S. Witte, A. J. den Boef

^*Corresponding author for this work

Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

Abstract

We present a method to calibrate and correct lens aberrations in dark-field Digital Holographic Microscope (df-DHM). In this method a gold nanoparticle is used to measure the point-spread function (PSF) of the df-DHM.

Original language	English
Title of host publication	Computational Optical Sensing and Imaging 2021 (COSI)
Subtitle of host publication	[Proceedings]
Publisher	OSA - The Optical Society
ISBN (Electronic)	9781943580897
Publication status	Published - 2021
Event	Computational Optical Sensing and Imaging, COSI 2021 - Part of OSA Imaging and Applied Optics Congress 2021 - Virtual, Online, United States Duration: 19 Jul 2021 → 23 Jul 2021

Publication series

Name	Optics InfoBase Conference Papers

Conference

Conference	Computational Optical Sensing and Imaging, COSI 2021 - Part of OSA Imaging and Applied Optics Congress 2021
Country/Territory	United States
City	Virtual, Online
Period	19/07/21 → 23/07/21

Bibliographical note

Publisher Copyright:
© OSA 2021, © 2021 The Author(s)

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https://www.osapublishing.org/abstract.cfm?uri=COSI-2021-CF2E.7

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Messinis, C., van Schaijk, T. T. M., Pandey, N., Koolen, A., de Boer, J. F., Witte, S., & den Boef, A. J. (2021). Lens aberration calibration and correction with plasmonic nanoparticles in off-axis dark-field digital holographic microscope for semiconductor metrology. In Computational Optical Sensing and Imaging 2021 (COSI): [Proceedings] Article CF2E.7 (Optics InfoBase Conference Papers). OSA - The Optical Society. https://www.osapublishing.org/abstract.cfm?uri=COSI-2021-CF2E.7

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title = "Lens aberration calibration and correction with plasmonic nanoparticles in off-axis dark-field digital holographic microscope for semiconductor metrology",

abstract = "We present a method to calibrate and correct lens aberrations in dark-field Digital Holographic Microscope (df-DHM). In this method a gold nanoparticle is used to measure the point-spread function (PSF) of the df-DHM.",

author = "C. Messinis and \{van Schaijk\}, \{T. T.M.\} and N. Pandey and A. Koolen and \{de Boer\}, \{J. F.\} and S. Witte and \{den Boef\}, \{A. J.\}",

note = "Publisher Copyright: {\textcopyright} OSA 2021, {\textcopyright} 2021 The Author(s); Computational Optical Sensing and Imaging, COSI 2021 - Part of OSA Imaging and Applied Optics Congress 2021 ; Conference date: 19-07-2021 Through 23-07-2021",

year = "2021",

language = "English",

series = "Optics InfoBase Conference Papers",

publisher = "OSA - The Optical Society",

booktitle = "Computational Optical Sensing and Imaging 2021 (COSI)",

address = "United States",

}

Messinis, C, van Schaijk, TTM, Pandey, N, Koolen, A, de Boer, JF , Witte, S & den Boef, AJ 2021, Lens aberration calibration and correction with plasmonic nanoparticles in off-axis dark-field digital holographic microscope for semiconductor metrology. in Computational Optical Sensing and Imaging 2021 (COSI): [Proceedings]., CF2E.7, Optics InfoBase Conference Papers, OSA - The Optical Society, Computational Optical Sensing and Imaging, COSI 2021 - Part of OSA Imaging and Applied Optics Congress 2021, Virtual, Online, United States, 19/07/21. <https://www.osapublishing.org/abstract.cfm?uri=COSI-2021-CF2E.7>

Lens aberration calibration and correction with plasmonic nanoparticles in off-axis dark-field digital holographic microscope for semiconductor metrology. / Messinis, C.; van Schaijk, T. T.M.; Pandey, N. et al.
Computational Optical Sensing and Imaging 2021 (COSI): [Proceedings]. OSA - The Optical Society, 2021. CF2E.7 (Optics InfoBase Conference Papers).

Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Lens aberration calibration and correction with plasmonic nanoparticles in off-axis dark-field digital holographic microscope for semiconductor metrology

AU - Messinis, C.

AU - van Schaijk, T. T.M.

AU - Pandey, N.

AU - Koolen, A.

AU - de Boer, J. F.

AU - Witte, S.

AU - den Boef, A. J.

PY - 2021

Y1 - 2021

N2 - We present a method to calibrate and correct lens aberrations in dark-field Digital Holographic Microscope (df-DHM). In this method a gold nanoparticle is used to measure the point-spread function (PSF) of the df-DHM.

AB - We present a method to calibrate and correct lens aberrations in dark-field Digital Holographic Microscope (df-DHM). In this method a gold nanoparticle is used to measure the point-spread function (PSF) of the df-DHM.

UR - https://www.scopus.com/pages/publications/85119513189

UR - https://www.scopus.com/inward/citedby.url?scp=85119513189&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:85119513189

T3 - Optics InfoBase Conference Papers

BT - Computational Optical Sensing and Imaging 2021 (COSI)

PB - OSA - The Optical Society

T2 - Computational Optical Sensing and Imaging, COSI 2021 - Part of OSA Imaging and Applied Optics Congress 2021

Y2 - 19 July 2021 through 23 July 2021

ER -

Messinis C, van Schaijk TTM, Pandey N, Koolen A, de Boer JF , Witte S et al. Lens aberration calibration and correction with plasmonic nanoparticles in off-axis dark-field digital holographic microscope for semiconductor metrology. In Computational Optical Sensing and Imaging 2021 (COSI): [Proceedings]. OSA - The Optical Society. 2021. CF2E.7. (Optics InfoBase Conference Papers). Epub 2021 Jul 19.

Lens aberration calibration and correction with plasmonic nanoparticles in off-axis dark-field digital holographic microscope for semiconductor metrology

Abstract

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Conference

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