TY - JOUR
T1 - Mass Loss from a Stretching Semitransparent Sheet of Liquid Tin
AU - Liu, Bo
AU - Kurilovich, Dmitry
AU - Gelderblom, Hanneke
AU - Versolato, Oscar O.
PY - 2020/2/13
Y1 - 2020/2/13
N2 - We experimentally study the morphology of a radially expanding sheet of liquid tin, formed by nanosecond-pulse Nd:YAG laser impact on a spherical microdroplet. Specifically, the sheet thickness profile and its time evolution are captured in detail over a range of laser-pulse energies and for two droplet sizes. Two complementary methods to determine this thickness are employed and shown to be in excellent agreement. All obtained thickness profiles collapse onto a single self-similar curve. Spatial integration of the thickness profiles allows us to determine the volume of the sheet. Remarkably, less than half of the initial amount of tin remains in the sheet under conditions relevant for industrial sources of extreme ultraviolet light, where these thin tin sheets serve as target material. Further analysis shows that the dominant fraction of the mass lost from the sheet during its expansion ends up as fine fragments. We propose that such mass loss can be minimized by producing the sheet targets on the shortest possible time scale. These findings may be particularly valuable for ongoing developments in state-of-the-art nanolithography.
AB - We experimentally study the morphology of a radially expanding sheet of liquid tin, formed by nanosecond-pulse Nd:YAG laser impact on a spherical microdroplet. Specifically, the sheet thickness profile and its time evolution are captured in detail over a range of laser-pulse energies and for two droplet sizes. Two complementary methods to determine this thickness are employed and shown to be in excellent agreement. All obtained thickness profiles collapse onto a single self-similar curve. Spatial integration of the thickness profiles allows us to determine the volume of the sheet. Remarkably, less than half of the initial amount of tin remains in the sheet under conditions relevant for industrial sources of extreme ultraviolet light, where these thin tin sheets serve as target material. Further analysis shows that the dominant fraction of the mass lost from the sheet during its expansion ends up as fine fragments. We propose that such mass loss can be minimized by producing the sheet targets on the shortest possible time scale. These findings may be particularly valuable for ongoing developments in state-of-the-art nanolithography.
UR - http://www.scopus.com/inward/record.url?scp=85079742031&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85079742031&partnerID=8YFLogxK
U2 - 10.1103/PhysRevApplied.13.024035
DO - 10.1103/PhysRevApplied.13.024035
M3 - Article
AN - SCOPUS:85079742031
SN - 2331-7019
VL - 13
SP - 1
EP - 10
JO - Physical Review Applied
JF - Physical Review Applied
IS - 2
M1 - 024035
ER -