Abstract
We experimentally study the morphology of a radially expanding sheet of liquid tin, formed by nanosecond-pulse Nd:YAG laser impact on a spherical microdroplet. Specifically, the sheet thickness profile and its time evolution are captured in detail over a range of laser-pulse energies and for two droplet sizes. Two complementary methods to determine this thickness are employed and shown to be in excellent agreement. All obtained thickness profiles collapse onto a single self-similar curve. Spatial integration of the thickness profiles allows us to determine the volume of the sheet. Remarkably, less than half of the initial amount of tin remains in the sheet under conditions relevant for industrial sources of extreme ultraviolet light, where these thin tin sheets serve as target material. Further analysis shows that the dominant fraction of the mass lost from the sheet during its expansion ends up as fine fragments. We propose that such mass loss can be minimized by producing the sheet targets on the shortest possible time scale. These findings may be particularly valuable for ongoing developments in state-of-the-art nanolithography.
Original language | English |
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Article number | 024035 |
Pages (from-to) | 1-10 |
Number of pages | 10 |
Journal | Physical Review Applied |
Volume | 13 |
Issue number | 2 |
DOIs | |
Publication status | Published - 13 Feb 2020 |
Funding
We thank Professor P. Planken for useful discussions on the transmission of light through thin metal layers. This work has been carried out at the Advanced Research Center for Nanolithography (ARCNL), a public-private partnership of the University of Amsterdam (UvA), the Vrije Universiteit Amsterdam (VU), the Netherlands Organisation for Scientific Research (NWO), and the semiconductor equipment manufacturer ASML. This project has received funding from the European Research Council (ERC) through Starting Grant No. 802648 and is part of the Vidi research program with Project No. 15697, which is financed by the NWO.
Funders | Funder number |
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Horizon 2020 Framework Programme | 802648 |
European Research Council | 15697 |
Universiteit van Amsterdam | |
Nederlandse Organisatie voor Wetenschappelijk Onderzoek |