Monolithic fiber-top sensor for critical environments and standard applications

D. Iannuzzi, S. Deladi, V. J. Gadgil, R.W. Sanders, H. Schreuders, M. C. Elwenspoek

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Abstract

We present a monolithic device obtained by carving a cantilever on the top of a single-mode optical fiber. We show that the vertical position of the cantilever can be determined with accuracy comparable to atomic force microscopes and other commonly used scientific instruments. The device does not require any alignment procedure and can be used in critical environments as well as in standard applications. © 2006 American Institute of Physics.
Original languageEnglish
Pages (from-to)053501-1
Number of pages3
JournalApplied Physics Letters
Volume88
Issue number5
DOIs
Publication statusPublished - 2006

Bibliographical note

Monolithic fiber-top sensor for critical environments and standard applications

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