Abstract
Light is a perfect tool for numerous metrology applications. To deliver light to hard-to-reach places, fiber probes are widely used. Hair-thin endoscopes based on multimode fibers offer exceptional performance in terms of information density and instrument footprint. Here, we integrate optical metrology into a flexible fiber probe and present a multimode fiber ruler for detecting nanometric displacements. A fast single-shot measurement demonstrates two-dimensional resolving power of 1.8 nm, which is 670 times smaller than the diffraction limit of the optical system and 24 times smaller than the demagnified image pixel size. The multimode fiber ruler does not require detailed field mapping; therefore, low-magnification optical systems can be used to increase the light intensity on a sensor. Moreover, the proposed approach does not rely on any special structures, such as optical grating or metasurfaces. A high-resolution two-dimensional fingerprint is naturally "printed"on the multimode fiber output facet. Our results enable fiber-based displacement measurements with nanometer precision, establishing a new benchmark for fiber-based optical alignment sensors and metrology.
Original language | English |
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Article number | 086103 |
Pages (from-to) | 1-7 |
Number of pages | 7 |
Journal | APL Photonics |
Volume | 7 |
Issue number | 8 |
DOIs | |
Publication status | Published - 26 Aug 2022 |
Bibliographical note
Funding Information:We thank Gerwin Osnabrugge (ARCNL) for fruitful discussions and Marco Seynen (AMOLF) for data acquisition software. This work was carried out within the ARCNL, a public–private partnership between UvA, VU, NWO, and ASML, and was partly financed by “Toeslag voor Topconsortia voor Kennis en Innovatie (TKI)” from the Dutch Ministry of Economic Affairs and Climate Policy.
Publisher Copyright:
© 2022 Author(s).
Funding
We thank Gerwin Osnabrugge (ARCNL) for fruitful discussions and Marco Seynen (AMOLF) for data acquisition software. This work was carried out within the ARCNL, a public–private partnership between UvA, VU, NWO, and ASML, and was partly financed by “Toeslag voor Topconsortia voor Kennis en Innovatie (TKI)” from the Dutch Ministry of Economic Affairs and Climate Policy.