Abstract
A recent study (2020 Nat. Commun. 11 2334) has found that transitions between multiply-excited configurations in open 4d-subshell tin ions are the dominant contributors to intense EUV emission from dense, Nd:YAG-driven (laser wavelength λ = 1.064 μm) tin plasmas. In the present study, we employ the Los Alamos Atomic code to investigate the spectral contribution from these transitions under industrially-relevant, CO2 laser-driven (λ = 10.6 μm) tin plasma conditions. First, we employ Busquet’s ionisation temperature method to match the average charge state (Z) of a non-local-thermodynamic equilibrium (non-LTE) plasma with an LTE one. This is done by varying the temperature of the LTE calculations until a so-called ionisation temperature TZ is established. Importantly, this approach generates LTE-computed configuration populations in excellent agreement with the non-LTE populations. A corollary of this observation is that the non-LTE populations are well-described by Boltzmann-type exponential distributions having effective temperatures Teff ≈ TZ. In the second part of this work, we perform extensive level-resolved LTE opacity calculations at TZ. It is found that 66% of the opacity in the industrially-relevant 2% bandwidth centred at 13.5 nm arises from transitions between multiply-excited states. These results reinforce the need for the consideration of complex, multiply-excited states in modelling the radiative properties of laser-driven plasma sources of EUV light.
| Original language | English |
|---|---|
| Article number | 035002 |
| Pages (from-to) | 1-11 |
| Number of pages | 11 |
| Journal | Journal of Physics B: Atomic, Molecular and Optical Physics |
| Volume | 54 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 22 Jan 2021 |
Bibliographical note
Funding Information:We would like to thank W van der Zande, W Ubachs and R Hoekstra for their useful comments on the paper. This project has received funding from European Research Council (ERC) Starting Grant No. 802648 and is part of the VIDI research programme with Project No. 15697, which is financed by the Netherlands Organization for Scientific Research (NWO). Part of this work has been carried out at the Advanced Research Center for Nanolithography (ARCNL), a public-private partnership of the University of Amsterdam (UvA), the Vrije Universiteit Amsterdam (VU), NWO and the semiconductor equipment manufacturer ASML. Part of this work was supported by the ASC PEM programme of the US Department of Energy through the Los Alamos National Laboratory. Los Alamos National Laboratory is operated by Triad National Security, LLC, for the National Nuclear Security Administration of US Department of Energy (Contract No. 89233218NCA000001).
Publisher Copyright:
© 2021 IOP Publishing Ltd Printed in the UK
Copyright:
Copyright 2021 Elsevier B.V., All rights reserved.
Funding
We would like to thank W van der Zande, W Ubachs and R Hoekstra for their useful comments on the paper. This project has received funding from European Research Council (ERC) Starting Grant No. 802648 and is part of the VIDI research programme with Project No. 15697, which is financed by the Netherlands Organization for Scientific Research (NWO). Part of this work has been carried out at the Advanced Research Center for Nanolithography (ARCNL), a public-private partnership of the University of Amsterdam (UvA), the Vrije Universiteit Amsterdam (VU), NWO and the semiconductor equipment manufacturer ASML. Part of this work was supported by the ASC PEM programme of the US Department of Energy through the Los Alamos National Laboratory. Los Alamos National Laboratory is operated by Triad National Security, LLC, for the National Nuclear Security Administration of US Department of Energy (Contract No. 89233218NCA000001).
| Funders | Funder number |
|---|---|
| U.S. Department of Energy | |
| Los Alamos National Laboratory | |
| Adhesives and Sealant Council | |
| European Research Council | 15697, 802648 |
| European Research Council | |
| Nederlandse Organisatie voor Wetenschappelijk Onderzoek |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 13 Climate Action
Keywords
- Effective temperature
- Multiply-excited states
- Non-LTE
- Opacity
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