Nanolithography with metastable helium atoms

S.J.H. Petra, L. Feenstra, W. Vassen, W. Hogervorst

Research output: Contribution to ConferenceAbstractOther research output

Original languageEnglish
Publication statusPublished - 2000
Eventconferentie - Amsterdam
Duration: 16 Nov 200017 Nov 2000

Conference

Conferenceconferentie
Period16/11/0017/11/00

Bibliographical note

Proceedings title: 25ste najaarsvergadering van de sectie Atoomfysica en Quantumelektronica van de NNV
Place of publication: Amsterdam
Volume: 25

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