Nanolithography with metastable helium atoms

S.J.H. Petra, L. Feenstra, W. Vassen, W. Hogervorst

Research output: Contribution to JournalMeeting AbstractOther research output

Original languageEnglish
JournalEuropean Symposium on Controlled Drug Delivery
Publication statusPublished - 2000
Eventconferentie - Nice, France
Duration: 10 Sep 200015 Sep 2000

Bibliographical note

Proceedings title: IQEC/CLEO
Place of publication: Nice, France

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