Nanolithography with metastable helium atoms

S.J.H. Petra, L. Feenstra, W. Vassen, W. Hogervorst

Research output: Contribution to Journal › Meeting Abstract › Other research output

Original language	English
Journal	European Symposium on Controlled Drug Delivery
Publication status	Published - 2000
Event	conferentie - Nice, France Duration: 10 Sept 2000 → 15 Sept 2000

Proceedings title: IQEC/CLEO
Place of publication: Nice, France

Persistent URL (handle)

@article{ff65234b57d748f88efd2d2ae4e85940,

title = "Nanolithography with metastable helium atoms",

author = "S.J.H. Petra and L. Feenstra and W. Vassen and W. Hogervorst",

note = "Proceedings title: IQEC/CLEO Place of publication: Nice, France; conferentie ; Conference date: 10-09-2000 Through 15-09-2000",

year = "2000",

language = "English",

journal = "European Symposium on Controlled Drug Delivery",

issn = "1567-4886",

}

TY - JOUR

T1 - Nanolithography with metastable helium atoms

AU - Petra, S.J.H.

AU - Feenstra, L.

AU - Vassen, W.

AU - Hogervorst, W.

N1 - Proceedings title: IQEC/CLEO Place of publication: Nice, France

PY - 2000

Y1 - 2000

M3 - Meeting Abstract

SN - 1567-4886

JO - European Symposium on Controlled Drug Delivery

JF - European Symposium on Controlled Drug Delivery

T2 - conferentie

Y2 - 10 September 2000 through 15 September 2000

ER -