Nanolithography with metastable helium atoms

S.J.H. Petra, L. Feenstra, W. Vassen, W. Hogervorst

Research output: Contribution to ConferenceAbstractOther research output

Original languageEnglish
Publication statusPublished - 2000
EventCOMOP meeting, Vrije Universiteit - Amsterdam
Duration: 10 Mar 200010 Mar 2000


ConferenceCOMOP meeting, Vrije Universiteit

Bibliographical note

Proceedings title: COMOP
Place of publication: Amsterdam

Cite this

Petra, S. J. H., Feenstra, L., Vassen, W., & Hogervorst, W. (2000). Nanolithography with metastable helium atoms. Abstract from COMOP meeting, Vrije Universiteit, .