Nanolithography with metastable helium atoms

S.J.H. Petra, L. Feenstra, W. Vassen, W. Hogervorst

Research output: Contribution to ConferenceAbstractOther research output

Original languageEnglish
Publication statusPublished - 2000
EventCOMOP meeting, Vrije Universiteit - Amsterdam
Duration: 10 Mar 200010 Mar 2000

Conference

ConferenceCOMOP meeting, Vrije Universiteit
Period10/03/0010/03/00

Bibliographical note

Proceedings title: COMOP
Place of publication: Amsterdam

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