Nanolithography with metastable helium atoms

S.J.H. Petra; L. Feenstra; W. Vassen; W. Hogervorst

Nanolithography with metastable helium atoms

S.J.H. Petra, L. Feenstra, W. Vassen, W. Hogervorst

Quantum Metrology & Laser Applications

Research output: Contribution to Conference › Abstract › Other research output

Original language	English
Publication status	Published - 2000
Event	conferentie - Amsterdam Duration: 16 Nov 2000 → 17 Nov 2000

Conference

Conference	conferentie
Period	16/11/00 → 17/11/00

Bibliographical note

Proceedings title: 25ste najaarsvergadering van de sectie Atoomfysica en Quantumelektronica van de NNV
Place of publication: Amsterdam
Volume: 25

Persistent URL (handle)

Persistent link

Cite this

@conference{31083b75d04e4b9484187dcbe680a62a,

title = "Nanolithography with metastable helium atoms",

author = "S.J.H. Petra and L. Feenstra and W. Vassen and W. Hogervorst",

note = "Proceedings title: 25ste najaarsvergadering van de sectie Atoomfysica en Quantumelektronica van de NNV Place of publication: Amsterdam Volume: 25; conferentie ; Conference date: 16-11-2000 Through 17-11-2000",

year = "2000",

language = "English",

}

TY - CONF

T1 - Nanolithography with metastable helium atoms

AU - Petra, S.J.H.

AU - Feenstra, L.

AU - Vassen, W.

AU - Hogervorst, W.

N1 - Proceedings title: 25ste najaarsvergadering van de sectie Atoomfysica en Quantumelektronica van de NNV Place of publication: Amsterdam Volume: 25

PY - 2000

Y1 - 2000

M3 - Abstract

T2 - conferentie

Y2 - 16 November 2000 through 17 November 2000

ER -