Noninvasive Deterministic Nanostructures Lithography on 2D Transition Metal Dichalcogenides

Lorenzo Ramò; Ermes Peci; Michele Magnozzi; Emma Spotorno; Valentina Venturino; Maria Sygletou; Maria Caterina Giordano; Giorgio Zambito; Francesca Telesio; Zygmunt Milosz; Maurizio Canepa; Francesco Bisio

doi:10.1002/adem.202401157

Noninvasive Deterministic Nanostructures Lithography on 2D Transition Metal Dichalcogenides

Lorenzo Ramò, Ermes Peci, Michele Magnozzi, Emma Spotorno, Valentina Venturino, Maria Sygletou, Maria Caterina Giordano, Giorgio Zambito, Francesca Telesio, Zygmunt Milosz, Maurizio Canepa, Francesco Bisio

Research output: Contribution to Journal › Article › Academic › peer-review

Abstract

The coupling of nanostructures with emerging 2D semiconductors is gaining significant interest thanks to the unique features of these hybrids systems, which make them key platforms for next-generation applications in electronics, optoelectronics, and sensing. Top-down lithographic approaches uniquely enable the fully deterministic high-resolution fabrication of nanostructures, but some of them, like electron-beam lithography and focused ion-beam lithography, employ energetic particles that may damage 2D materials causing an unwanted loss of functionality. Herein thermal scanning probe lithography is applied for the realization of metallic nanoantennas directly on top of exfoliated 2D MoS2 flakes, showing it can avoid the degradation of this delicate substrate. It is shown that the morphologic and optical features of MoS2 are fully preserved after the lithography.

Original language	English
Article number	2401157
Journal	Advanced Engineering Materials
Volume	27
Issue number	1
DOIs	https://doi.org/10.1002/adem.202401157
Publication status	Published - 1 Jan 2025
Externally published	Yes

Funding

The research leading to these results has received funding from the Ministero dell’Istruzione, dell’Università e della Ricerca: Dipartimenti di Eccellenza 2018–2022, and PRIN 2017 no. 2017KFY7XF. M.C. G. acknowledges support of Ministero dell’Università e della Ricerca (MUR), project PRIN 2022 PNRR, project number: P2022JWKAC, ‘2D-PLANET’ funded by European community Next Generation EU within the programme “PNRR Missione 4 - Componente 2 - Investimento 1.1 Fondo per il Programma Nazionale di Ricerca e Progetti di Rilevante Interesse Nazionale (PRIN)” and Project PRIN 2022, project number: 2022EE8KH9, ‘DESIGN’. The authors acknowledge Elettra Sincrotrone Trieste for providing access to its synchrotron radiation facilities and for financial support under the SUI internal project. The authors acknowledge Luca Gregoratti and Matteo Amati for assistance during X-ray photoelectron microscopy measurements and Professor F. Buatier de Mongeot for useful discussions about the use of NanoFrazor. Open access publishing facilitated by Consiglio Nazionale delle Ricerche, as part of the Wiley - CRUI-CARE agreement. The research leading to these results has received funding from the Ministero dell’Istruzione, dell’Università e della Ricerca: Dipartimenti di Eccellenza 2018–2022, and PRIN 2017 no. 2017KFY7XF. M.C. G. acknowledges support of Ministero dell’Università e della Ricerca (MUR), project PRIN 2022 PNRR, project number: P2022JWKAC, ‘2D‐PLANET’ funded by European community Next Generation EU within the programme “PNRR Missione 4 ‐ Componente 2 ‐ Investimento 1.1 Fondo per il Programma Nazionale di Ricerca e Progetti di Rilevante Interesse Nazionale (PRIN)” and Project PRIN 2022, project number: 2022EE8KH9, ‘DESIGN’. The authors acknowledge Elettra Sincrotrone Trieste for providing access to its synchrotron radiation facilities and for financial support under the SUI internal project. The authors acknowledge Luca Gregoratti and Matteo Amati for assistance during X‐ray photoelectron microscopy measurements and Professor F. Buatier de Mongeot for useful discussions about the use of NanoFrazor.

Funders	Funder number
Consiglio Nazionale delle Ricerche
Ministero dell’Istruzione, dell’Università e della Ricerca	2017KFY7XF, P2022JWKAC
European Commission	2022EE8KH9, PRIN 2022

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title = "Noninvasive Deterministic Nanostructures Lithography on 2D Transition Metal Dichalcogenides",

abstract = "The coupling of nanostructures with emerging 2D semiconductors is gaining significant interest thanks to the unique features of these hybrids systems, which make them key platforms for next-generation applications in electronics, optoelectronics, and sensing. Top-down lithographic approaches uniquely enable the fully deterministic high-resolution fabrication of nanostructures, but some of them, like electron-beam lithography and focused ion-beam lithography, employ energetic particles that may damage 2D materials causing an unwanted loss of functionality. Herein thermal scanning probe lithography is applied for the realization of metallic nanoantennas directly on top of exfoliated 2D MoS2 flakes, showing it can avoid the degradation of this delicate substrate. It is shown that the morphologic and optical features of MoS2 are fully preserved after the lithography.",

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AU - Ramò, Lorenzo

AU - Peci, Ermes

AU - Magnozzi, Michele

AU - Spotorno, Emma

AU - Venturino, Valentina

AU - Sygletou, Maria

AU - Giordano, Maria Caterina

AU - Zambito, Giorgio

AU - Telesio, Francesca

AU - Milosz, Zygmunt

AU - Canepa, Maurizio

AU - Bisio, Francesco

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AB - The coupling of nanostructures with emerging 2D semiconductors is gaining significant interest thanks to the unique features of these hybrids systems, which make them key platforms for next-generation applications in electronics, optoelectronics, and sensing. Top-down lithographic approaches uniquely enable the fully deterministic high-resolution fabrication of nanostructures, but some of them, like electron-beam lithography and focused ion-beam lithography, employ energetic particles that may damage 2D materials causing an unwanted loss of functionality. Herein thermal scanning probe lithography is applied for the realization of metallic nanoantennas directly on top of exfoliated 2D MoS2 flakes, showing it can avoid the degradation of this delicate substrate. It is shown that the morphologic and optical features of MoS2 are fully preserved after the lithography.

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Noninvasive Deterministic Nanostructures Lithography on 2D Transition Metal Dichalcogenides

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