Optical fiber for transmitting UV radiation for treating photoresist materials, comprises distal end provided with optical mask adapted to project predetermined pattern on target surface by radiation transmitted from distal end

D. Iannuzzi; A. Petrusis; J.H. Rector

Optical fiber for transmitting UV radiation for treating photoresist materials, comprises distal end provided with optical mask adapted to project predetermined pattern on target surface by radiation transmitted from distal end

D. Iannuzzi, A. Petrusis, J.H. Rector

Research output: Contribution to Journal › Article › Academic › peer-review

Original language	English
Journal	Universitas
Publication status	Published - 2010

Bibliographical note

Derwent Primary Accession Number: 2010-F97403 [38]

Persistent URL (handle)

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Cite this

@article{e48952beabc4436887ae55fabb448b8b,

title = "Optical fiber for transmitting UV radiation for treating photoresist materials, comprises distal end provided with optical mask adapted to project predetermined pattern on target surface by radiation transmitted from distal end",

author = "D. Iannuzzi and A. Petrusis and J.H. Rector",

note = "Derwent Primary Accession Number: 2010-F97403 [38]",

year = "2010",

language = "English",

journal = "Universitas",

issn = "0041-9079",

}

Optical fiber for transmitting UV radiation for treating photoresist materials, comprises distal end provided with optical mask adapted to project predetermined pattern on target surface by radiation transmitted from distal end. / Iannuzzi, D.; Petrusis, A.; Rector, J.H.
In: Universitas, 2010.

Research output: Contribution to Journal › Article › Academic › peer-review

TY - JOUR

T1 - Optical fiber for transmitting UV radiation for treating photoresist materials, comprises distal end provided with optical mask adapted to project predetermined pattern on target surface by radiation transmitted from distal end

AU - Iannuzzi, D.

AU - Petrusis, A.

AU - Rector, J.H.

N1 - Derwent Primary Accession Number: 2010-F97403 [38]

PY - 2010

Y1 - 2010

M3 - Article

SN - 0041-9079

JO - Universitas

JF - Universitas

ER -