Abstract
We present a fabrication procedure for batch production of MEMS devices directly on top of an optical fiber. The procedure relies on the approach introduced earlier by our group (Gavan et al 2011 Opt. Lett. 36 2898-900), which has been optimized here to obtain higher yield and increased reliability. We describe in details the eight steps of the procedure and we show its application to the fabrication of several cantilever-based structures. Overall, we report a process yield of 80% functioning MEMS devices in our final batch.
| Original language | English |
|---|---|
| Article number | 115005 |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 27 |
| Issue number | 11 |
| DOIs | |
| Publication status | Published - 4 Oct 2017 |
Funding
The research leading to these results is supported by The Netherlands Organization for Scientific Research (NWO) under the iMIT program (P11-13), the European Research Council (615170) and has received funding from LASERLAB-EUROPE under the ECs Seventh Framework Programme (grant agreement no. 284464). The authors would like to thank C H van Hoorn (VU, Amsterdam) and H Zijlemaker (Amolf, Amsterdam) for the production of various patterns in the AS mask fibers using FIB, J Weda (VU, Amsterdam) for his contribution to the fiber preparation, and K Ma (TU, Twente) for the spray coating of the PR layer on the Altaspray DS8.
| Funders | Funder number |
|---|---|
| Netherlands Organization for Scientific Research | |
| European Research Council | 615170 |
| Nederlandse Organisatie voor Wetenschappelijk Onderzoek | P11-13 |
| Seventh Framework Programme | 284464 |
