Parallel acquisition of multiple images using coherence gating in off-axis dark-field digital holographic microscope for semiconductor metrology

C. Messinis; T. T.M. van Schaijk; V. T. Tenner; J. F. de Boer; S. Witte; A. J. den Boef

Parallel acquisition of multiple images using coherence gating in off-axis dark-field digital holographic microscope for semiconductor metrology

C. Messinis^*
, T. T.M. van Schaijk
, V. T. Tenner
, J. F. de Boer
, S. Witte
, A. J. den Boef

^*Corresponding author for this work

Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

Abstract

We present an Off-Axis dark-field digital holographic microscope capable of parallel acquisition of multiple holograms. With this microscope we aim to measure overlay (OV) with sub-nanometer precision and milli-second acquisition times over large wavelength range.

Original language	English
Title of host publication	Proceedings Imaging and Applied Optics Congress
Subtitle of host publication	Computational Optical Sensing and Imaging
Publisher	OSA - The Optical Society
ISBN (Electronic)	9781557528209
Publication status	Published - 2020
Event	Computational Optical Sensing and Imaging, COSI 2020 - Part of Imaging and Applied Optics Congress 2020 - Virtual, Online, United States Duration: 22 Jun 2020 → 26 Jun 2020

Publication series

Name	Optics InfoBase Conference Papers

Conference

Conference	Computational Optical Sensing and Imaging, COSI 2020 - Part of Imaging and Applied Optics Congress 2020
Country/Territory	United States
City	Virtual, Online
Period	22/06/20 → 26/06/20

Bibliographical note

Publisher Copyright:
© 2020 The Author(s)

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https://www.osapublishing.org/abstract.cfm?uri=COSI-2020-CF4C.6

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Messinis, C., van Schaijk, T. T. M., Tenner, V. T., de Boer, J. F., Witte, S., & den Boef, A. J. (2020). Parallel acquisition of multiple images using coherence gating in off-axis dark-field digital holographic microscope for semiconductor metrology. In Proceedings Imaging and Applied Optics Congress: Computational Optical Sensing and Imaging Article CF4C.6 (Optics InfoBase Conference Papers). OSA - The Optical Society. https://www.osapublishing.org/abstract.cfm?uri=COSI-2020-CF4C.6

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title = "Parallel acquisition of multiple images using coherence gating in off-axis dark-field digital holographic microscope for semiconductor metrology",

abstract = "We present an Off-Axis dark-field digital holographic microscope capable of parallel acquisition of multiple holograms. With this microscope we aim to measure overlay (OV) with sub-nanometer precision and milli-second acquisition times over large wavelength range.",

author = "C. Messinis and \{van Schaijk\}, \{T. T.M.\} and Tenner, \{V. T.\} and \{de Boer\}, \{J. F.\} and S. Witte and \{den Boef\}, \{A. J.\}",

note = "Publisher Copyright: {\textcopyright} 2020 The Author(s); Computational Optical Sensing and Imaging, COSI 2020 - Part of Imaging and Applied Optics Congress 2020 ; Conference date: 22-06-2020 Through 26-06-2020",

year = "2020",

language = "English",

series = "Optics InfoBase Conference Papers",

publisher = "OSA - The Optical Society",

booktitle = "Proceedings Imaging and Applied Optics Congress",

address = "United States",

}

Messinis, C, van Schaijk, TTM, Tenner, VT, de Boer, JF , Witte, S & den Boef, AJ 2020, Parallel acquisition of multiple images using coherence gating in off-axis dark-field digital holographic microscope for semiconductor metrology. in Proceedings Imaging and Applied Optics Congress: Computational Optical Sensing and Imaging., CF4C.6, Optics InfoBase Conference Papers, OSA - The Optical Society, Computational Optical Sensing and Imaging, COSI 2020 - Part of Imaging and Applied Optics Congress 2020, Virtual, Online, United States, 22/06/20. <https://www.osapublishing.org/abstract.cfm?uri=COSI-2020-CF4C.6>

Parallel acquisition of multiple images using coherence gating in off-axis dark-field digital holographic microscope for semiconductor metrology. / Messinis, C.; van Schaijk, T. T.M.; Tenner, V. T. et al.
Proceedings Imaging and Applied Optics Congress: Computational Optical Sensing and Imaging. OSA - The Optical Society, 2020. CF4C.6 (Optics InfoBase Conference Papers).

Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

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T1 - Parallel acquisition of multiple images using coherence gating in off-axis dark-field digital holographic microscope for semiconductor metrology

AU - Messinis, C.

AU - van Schaijk, T. T.M.

AU - Tenner, V. T.

AU - de Boer, J. F.

AU - Witte, S.

AU - den Boef, A. J.

PY - 2020

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AB - We present an Off-Axis dark-field digital holographic microscope capable of parallel acquisition of multiple holograms. With this microscope we aim to measure overlay (OV) with sub-nanometer precision and milli-second acquisition times over large wavelength range.

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UR - https://www.scopus.com/pages/publications/85118608056#tab=citedBy

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M3 - Conference contribution

AN - SCOPUS:85118608056

T3 - Optics InfoBase Conference Papers

BT - Proceedings Imaging and Applied Optics Congress

PB - OSA - The Optical Society

T2 - Computational Optical Sensing and Imaging, COSI 2020 - Part of Imaging and Applied Optics Congress 2020

Y2 - 22 June 2020 through 26 June 2020

ER -

Messinis C, van Schaijk TTM, Tenner VT, de Boer JF , Witte S , den Boef AJ. Parallel acquisition of multiple images using coherence gating in off-axis dark-field digital holographic microscope for semiconductor metrology. In Proceedings Imaging and Applied Optics Congress: Computational Optical Sensing and Imaging. OSA - The Optical Society. 2020. CF4C.6. (Optics InfoBase Conference Papers).

Parallel acquisition of multiple images using coherence gating in off-axis dark-field digital holographic microscope for semiconductor metrology

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