Parametric resonance and Hopf bifurcation analysis for a MEMS resonator

C. van der Avoort, R. van der Hout, J. Hulshof

Research output: Contribution to JournalArticleAcademicpeer-review


We study the response of a MEMS resonator, driven in an in-plane length-extensional mode of excitation. It is observed that the amplitude of the resulting vibration has an upper bound, i.e., the response shows saturation. We present a model for this phenomenon, incorporating interaction with a bending mode. We show that this model accurately describes the observed phenomena. The in-plane ("trivial") mode is shown to be stable up to a critical value of the amplitude of the excitation. At this value, a new "bending" branch of solutions bifurcates. For appropriate values of the parameters, a subsequent Hopf bifurcation causes a beating phenomenon, in accordance with experimental observations. © 2011 Elsevier B.V. All rights reserved.
Original languageEnglish
Pages (from-to)913-919
Number of pages7
JournalPhysica D. Nonlinear Phenomena
Issue number11
Publication statusPublished - 2011


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