TY - JOUR
T1 - Parametric resonance and Hopf bifurcation analysis for a MEMS resonator
AU - van der Avoort, C.
AU - van der Hout, R.
AU - Hulshof, J.
PY - 2011
Y1 - 2011
N2 - We study the response of a MEMS resonator, driven in an in-plane length-extensional mode of excitation. It is observed that the amplitude of the resulting vibration has an upper bound, i.e., the response shows saturation. We present a model for this phenomenon, incorporating interaction with a bending mode. We show that this model accurately describes the observed phenomena. The in-plane ("trivial") mode is shown to be stable up to a critical value of the amplitude of the excitation. At this value, a new "bending" branch of solutions bifurcates. For appropriate values of the parameters, a subsequent Hopf bifurcation causes a beating phenomenon, in accordance with experimental observations. © 2011 Elsevier B.V. All rights reserved.
AB - We study the response of a MEMS resonator, driven in an in-plane length-extensional mode of excitation. It is observed that the amplitude of the resulting vibration has an upper bound, i.e., the response shows saturation. We present a model for this phenomenon, incorporating interaction with a bending mode. We show that this model accurately describes the observed phenomena. The in-plane ("trivial") mode is shown to be stable up to a critical value of the amplitude of the excitation. At this value, a new "bending" branch of solutions bifurcates. For appropriate values of the parameters, a subsequent Hopf bifurcation causes a beating phenomenon, in accordance with experimental observations. © 2011 Elsevier B.V. All rights reserved.
UR - https://www.scopus.com/pages/publications/79953756652
UR - https://www.scopus.com/inward/citedby.url?scp=79953756652&partnerID=8YFLogxK
U2 - 10.1016/j.physd.2011.01.004
DO - 10.1016/j.physd.2011.01.004
M3 - Article
SN - 0167-2789
VL - 240
SP - 913
EP - 919
JO - Physica D. Nonlinear Phenomena
JF - Physica D. Nonlinear Phenomena
IS - 11
ER -