Performance predictions for a laser-intensified thermal beam for use in high-resolution focused-ion-beam instruments

S.H.W. Wouters, G. ten Haaf, R.P.M.J.W. Notermans, N. Debernardi, P.H.A. Mutsaers, O.J. Luiten, E.J.D. Vredenbregt

Research output: Contribution to JournalArticleAcademicpeer-review

Abstract

Photoionization of a laser-cooled and compressed atomic beam from a high-flux thermal source can be used to create a high-brightness ion beam for use in focused-ion-beam instruments. Here we show using calculations and Doppler cooling simulations that an atomic rubidium beam with an equivalent brightness of 2.1×107 A/(m2 sr eV) can be created using a compact 5 cm long two-dimensional magneto-optical compressor. If this can be conserved during the photoionization process, this leads to an ion beam brightness an order of magnitude higher than produced by a liquid metal ion source. The source is also capable of producing a flux of 6.2×109 s-1 that results in a substantial beam current of 1 nA once fully ionized.
Original languageEnglish
Article number063817
Number of pages8
JournalPhysical Review A. Atomic, Molecular and Optical Physics
Volume90
DOIs
Publication statusPublished - 2014

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