Sn ion energy distributions of ns- A nd ps-laser produced plasmas

A. Bayerle, M. J. Deuzeman, S. Van Der Heijden, D. Kurilovich, T. D. De Faria Pinto, A. Stodolna, S. Witte, K. S.E. Eikema, W. Ubachs, R. Hoekstra, O. O. Versolato

Research output: Contribution to JournalArticleAcademicpeer-review

Abstract

Ion energy distributions arising from laser-produced plasmas of Sn are measured over a wide laser parameter space. Planar-solid and liquid-droplet targets are exposed to infrared laser pulses with energy densities between 1 J cm-2 and 4 kJ cm-2 and durations spanning 0.5 ps to 6 ns. The measured ion energy distributions are compared to two self-similar solutions of a hydrodynamic approach assuming isothermal expansion of the plasma plume into vacuum. For planar and droplet targets exposed to ps-long pulses, we find good agreement between the experimental results and the self-similar solution of a semi-infinite simple planar plasma configuration with an exponential density profile. The ion energy distributions resulting from solid Sn exposed to ns-pulses agrees with solutions of a limited-mass model that assumes a Gaussian-shaped initial density profile.

Original languageEnglish
Article number045001
Pages (from-to)1-9
Number of pages8
JournalPlasma sources science & technology
Volume27
Issue number4
DOIs
Publication statusPublished - 4 Apr 2018

Funding

We thank M Basko for fruitful discussions. This work has been carried out at the Advanced Research Center for Nanolithography (ARCNL), a public-private partnership of the University of Amsterdam (UvA), the Vrije Universiteit Amsterdam, the Netherlands Organisation for Scientific Research (NWO) and the semiconductor equipment manufacturer ASML.

FundersFunder number
Horizon 2020 Framework Programme670168
Universiteit van Amsterdam
Nederlandse Organisatie voor Wetenschappelijk Onderzoek

    Keywords

    • ion energy
    • laser-produced plasma
    • Plasma expansion

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