Abstract
Ion energy distributions arising from laser-produced plasmas of Sn are measured over a wide laser parameter space. Planar-solid and liquid-droplet targets are exposed to infrared laser pulses with energy densities between 1 J cm-2 and 4 kJ cm-2 and durations spanning 0.5 ps to 6 ns. The measured ion energy distributions are compared to two self-similar solutions of a hydrodynamic approach assuming isothermal expansion of the plasma plume into vacuum. For planar and droplet targets exposed to ps-long pulses, we find good agreement between the experimental results and the self-similar solution of a semi-infinite simple planar plasma configuration with an exponential density profile. The ion energy distributions resulting from solid Sn exposed to ns-pulses agrees with solutions of a limited-mass model that assumes a Gaussian-shaped initial density profile.
Original language | English |
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Article number | 045001 |
Pages (from-to) | 1-9 |
Number of pages | 8 |
Journal | Plasma sources science & technology |
Volume | 27 |
Issue number | 4 |
DOIs | |
Publication status | Published - 4 Apr 2018 |
Funding
We thank M Basko for fruitful discussions. This work has been carried out at the Advanced Research Center for Nanolithography (ARCNL), a public-private partnership of the University of Amsterdam (UvA), the Vrije Universiteit Amsterdam, the Netherlands Organisation for Scientific Research (NWO) and the semiconductor equipment manufacturer ASML.
Funders | Funder number |
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Horizon 2020 Framework Programme | 670168 |
Universiteit van Amsterdam | |
Nederlandse Organisatie voor Wetenschappelijk Onderzoek |
Keywords
- ion energy
- laser-produced plasma
- Plasma expansion