Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV

Oscar O. Versolato; Ruben Schupp; Lars Behnke; Yahia Y. Mostafa; Zoi Bouza; Adam Lassise; Muharrem Bayraktar; John Sheil; Ronnie Hoekstra; Wim Ubachs

doi:10.1364/EUVXRAY.2022.ETh5A.7

Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV

Oscar O. Versolato^*
, Ruben Schupp
, Lars Behnke
, Yahia Y. Mostafa
, Zoi Bouza
, Adam Lassise
, Muharrem Bayraktar
, John Sheil
, Ronnie Hoekstra
, Wim Ubachs

^*Corresponding author for this work

Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

Abstract

Extreme ultraviolet (EUV) nanolithography relies on CO2-lasers to drive EUV-emitting tin plasma at 10.6-micrometer wavelength. We will present research using instead solid-state laser light, at 2-micrometer wavelength, to efficiently drive plasma from carefully preshaped targets.

Original language	English
Title of host publication	Compact EUV and X-ray Light Sources (EUVXRAY 2022)
Subtitle of host publication	Proceedings Optica High-brightness Sources and Light-driven Interactions Congress 2022
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Electronic)	9781957171067
DOIs	https://doi.org/10.1364/EUVXRAY.2022.ETh5A.7
Publication status	Published - 2022
Event	Compact EUV and X-ray Light Sources, EUVXRAY 2022 - Budapest, Hungary Duration: 21 Mar 2022 → 25 Mar 2022

Publication series

Name	Optics InfoBase Conference Papers
ISSN (Electronic)	2162-2701

Conference

Conference	Compact EUV and X-ray Light Sources, EUVXRAY 2022
Country/Territory	Hungary
City	Budapest
Period	21/03/22 → 25/03/22

Bibliographical note

Publisher Copyright:
© 2022 The Author (s)

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10.1364/EUVXRAY.2022.ETh5A.7

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Versolato, O. O., Schupp, R., Behnke, L., Mostafa, Y. Y., Bouza, Z., Lassise, A., Bayraktar, M., Sheil, J., Hoekstra, R., & Ubachs, W. (2022). Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV. In Compact EUV and X-ray Light Sources (EUVXRAY 2022): Proceedings Optica High-brightness Sources and Light-driven Interactions Congress 2022 Article ETh5A.7 (Optics InfoBase Conference Papers). Optica Publishing Group (formerly OSA). https://doi.org/10.1364/EUVXRAY.2022.ETh5A.7

Versolato, Oscar O. ; Schupp, Ruben ; Behnke, Lars et al. / Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV. Compact EUV and X-ray Light Sources (EUVXRAY 2022): Proceedings Optica High-brightness Sources and Light-driven Interactions Congress 2022. Optica Publishing Group (formerly OSA), 2022. (Optics InfoBase Conference Papers).

@inproceedings{08cd2eb446cc45448faf6553c9b2637f,

title = "Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV",

abstract = "Extreme ultraviolet (EUV) nanolithography relies on CO2-lasers to drive EUV-emitting tin plasma at 10.6-micrometer wavelength. We will present research using instead solid-state laser light, at 2-micrometer wavelength, to efficiently drive plasma from carefully preshaped targets.",

author = "Versolato, \{Oscar O.\} and Ruben Schupp and Lars Behnke and Mostafa, \{Yahia Y.\} and Zoi Bouza and Adam Lassise and Muharrem Bayraktar and John Sheil and Ronnie Hoekstra and Wim Ubachs",

note = "Publisher Copyright: {\textcopyright} 2022 The Author (s); Compact EUV and X-ray Light Sources, EUVXRAY 2022 ; Conference date: 21-03-2022 Through 25-03-2022",

year = "2022",

doi = "10.1364/EUVXRAY.2022.ETh5A.7",

language = "English",

series = "Optics InfoBase Conference Papers",

publisher = "Optica Publishing Group (formerly OSA)",

booktitle = "Compact EUV and X-ray Light Sources (EUVXRAY 2022)",

}

Versolato, OO, Schupp, R, Behnke, L, Mostafa, YY, Bouza, Z, Lassise, A, Bayraktar, M, Sheil, J, Hoekstra, R & Ubachs, W 2022, Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV. in Compact EUV and X-ray Light Sources (EUVXRAY 2022): Proceedings Optica High-brightness Sources and Light-driven Interactions Congress 2022., ETh5A.7, Optics InfoBase Conference Papers, Optica Publishing Group (formerly OSA), Compact EUV and X-ray Light Sources, EUVXRAY 2022, Budapest, Hungary, 21/03/22. https://doi.org/10.1364/EUVXRAY.2022.ETh5A.7

Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV. / Versolato, Oscar O.; Schupp, Ruben; Behnke, Lars et al.
Compact EUV and X-ray Light Sources (EUVXRAY 2022): Proceedings Optica High-brightness Sources and Light-driven Interactions Congress 2022. Optica Publishing Group (formerly OSA), 2022. ETh5A.7 (Optics InfoBase Conference Papers).

Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV

AU - Versolato, Oscar O.

AU - Schupp, Ruben

AU - Behnke, Lars

AU - Mostafa, Yahia Y.

AU - Bouza, Zoi

AU - Lassise, Adam

AU - Bayraktar, Muharrem

AU - Sheil, John

AU - Hoekstra, Ronnie

AU - Ubachs, Wim

PY - 2022

Y1 - 2022

N2 - Extreme ultraviolet (EUV) nanolithography relies on CO2-lasers to drive EUV-emitting tin plasma at 10.6-micrometer wavelength. We will present research using instead solid-state laser light, at 2-micrometer wavelength, to efficiently drive plasma from carefully preshaped targets.

AB - Extreme ultraviolet (EUV) nanolithography relies on CO2-lasers to drive EUV-emitting tin plasma at 10.6-micrometer wavelength. We will present research using instead solid-state laser light, at 2-micrometer wavelength, to efficiently drive plasma from carefully preshaped targets.

UR - https://www.scopus.com/pages/publications/85136803032

UR - https://www.scopus.com/pages/publications/85136803032#tab=citedBy

U2 - 10.1364/EUVXRAY.2022.ETh5A.7

DO - 10.1364/EUVXRAY.2022.ETh5A.7

M3 - Conference contribution

AN - SCOPUS:85136803032

T3 - Optics InfoBase Conference Papers

BT - Compact EUV and X-ray Light Sources (EUVXRAY 2022)

PB - Optica Publishing Group (formerly OSA)

T2 - Compact EUV and X-ray Light Sources, EUVXRAY 2022

Y2 - 21 March 2022 through 25 March 2022

ER -

Versolato OO, Schupp R, Behnke L, Mostafa YY, Bouza Z, Lassise A et al. Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV. In Compact EUV and X-ray Light Sources (EUVXRAY 2022): Proceedings Optica High-brightness Sources and Light-driven Interactions Congress 2022. Optica Publishing Group (formerly OSA). 2022. ETh5A.7. (Optics InfoBase Conference Papers). Epub 2022 Mar 21. doi: 10.1364/EUVXRAY.2022.ETh5A.7

Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV

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