Solid-state-laser-produced microdroplet-Tin plasma sources of extreme ultraviolet radiation

L. Behnke; R. Schupp; Z. Bouza; J. Scheers; J. Sheil; R. Hoekstra; W. Ubachs; O. O. Versolato

doi:10.1364/EUVXRAY.2020.EF2A.2

Solid-state-laser-produced microdroplet-Tin plasma sources of extreme ultraviolet radiation

L. Behnke
, R. Schupp
, Z. Bouza
, J. Scheers
, J. Sheil
, R. Hoekstra
, W. Ubachs
, O. O. Versolato^*

^*Corresponding author for this work

Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

Abstract

Laser-produced tin plasmas are used for the generation of extreme ultraviolet (EUV) light for state-of-The-Art nanolithography. Currently, CO2-gas lasers operating at 10-micrometer wavelength are used to drive the EUV-emitting plasma but with further developments regarding their output power, solid-state lasers operating at shorter, mid-infrared wavelengths may present a viable alternative. Such novel laser systems may provide a significantly higher efficiency in converting electrical power to laser light. We use an extensive diagnostic toolset to characterize and understand the physics of solid-state-laser-driven plasma light sources at the atomic level.

Original language	English
Title of host publication	Compact EUV and X-ray Light Sources 2020 (EUVXRAY)
Subtitle of host publication	[Proceedings]
Publisher	OSA - The Optical Society
ISBN (Electronic)	9781557528209
ISBN (Print)	9781943580736
DOIs	https://doi.org/10.1364/EUVXRAY.2020.EF2A.2
Publication status	Published - 2020
Event	2020 Compact EUV and X-ray Light Sources, EUVXRAY 2020 - Part of OSA High-Brightness Sources and Light-Driven Interactions Congress 2020 - Washington, United States Duration: 16 Nov 2020 → 20 Nov 2020

Publication series

Name	Optics InfoBase Conference Papers
ISSN (Electronic)	2162-2701

Conference

Conference	2020 Compact EUV and X-ray Light Sources, EUVXRAY 2020 - Part of OSA High-Brightness Sources and Light-Driven Interactions Congress 2020
Country/Territory	United States
City	Washington
Period	16/11/20 → 20/11/20

Bibliographical note

Publisher Copyright:
© 2020 OSA - The Optical Society. All rights reserved.

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

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10.1364/EUVXRAY.2020.EF2A.2

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Cite this

Behnke, L., Schupp, R., Bouza, Z., Scheers, J., Sheil, J., Hoekstra, R., Ubachs, W., & Versolato, O. O. (2020). Solid-state-laser-produced microdroplet-Tin plasma sources of extreme ultraviolet radiation. In Compact EUV and X-ray Light Sources 2020 (EUVXRAY): [Proceedings] Article EF2A.2 (Optics InfoBase Conference Papers). OSA - The Optical Society. https://doi.org/10.1364/EUVXRAY.2020.EF2A.2

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title = "Solid-state-laser-produced microdroplet-Tin plasma sources of extreme ultraviolet radiation",

abstract = "Laser-produced tin plasmas are used for the generation of extreme ultraviolet (EUV) light for state-of-The-Art nanolithography. Currently, CO2-gas lasers operating at 10-micrometer wavelength are used to drive the EUV-emitting plasma but with further developments regarding their output power, solid-state lasers operating at shorter, mid-infrared wavelengths may present a viable alternative. Such novel laser systems may provide a significantly higher efficiency in converting electrical power to laser light. We use an extensive diagnostic toolset to characterize and understand the physics of solid-state-laser-driven plasma light sources at the atomic level.",

author = "L. Behnke and R. Schupp and Z. Bouza and J. Scheers and J. Sheil and R. Hoekstra and W. Ubachs and Versolato, \{O. O.\}",

note = "Publisher Copyright: {\textcopyright} 2020 OSA - The Optical Society. All rights reserved.; 2020 Compact EUV and X-ray Light Sources, EUVXRAY 2020 - Part of OSA High-Brightness Sources and Light-Driven Interactions Congress 2020 ; Conference date: 16-11-2020 Through 20-11-2020",

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doi = "10.1364/EUVXRAY.2020.EF2A.2",

language = "English",

isbn = "9781943580736",

series = "Optics InfoBase Conference Papers",

publisher = "OSA - The Optical Society",

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}

Behnke, L, Schupp, R, Bouza, Z, Scheers, J, Sheil, J, Hoekstra, R, Ubachs, W & Versolato, OO 2020, Solid-state-laser-produced microdroplet-Tin plasma sources of extreme ultraviolet radiation. in Compact EUV and X-ray Light Sources 2020 (EUVXRAY): [Proceedings]., EF2A.2, Optics InfoBase Conference Papers, OSA - The Optical Society, 2020 Compact EUV and X-ray Light Sources, EUVXRAY 2020 - Part of OSA High-Brightness Sources and Light-Driven Interactions Congress 2020, Washington, United States, 16/11/20. https://doi.org/10.1364/EUVXRAY.2020.EF2A.2

Solid-state-laser-produced microdroplet-Tin plasma sources of extreme ultraviolet radiation. / Behnke, L.; Schupp, R.; Bouza, Z. et al.
Compact EUV and X-ray Light Sources 2020 (EUVXRAY): [Proceedings]. OSA - The Optical Society, 2020. EF2A.2 (Optics InfoBase Conference Papers).

Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

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AU - Behnke, L.

AU - Schupp, R.

AU - Bouza, Z.

AU - Scheers, J.

AU - Sheil, J.

AU - Hoekstra, R.

AU - Ubachs, W.

AU - Versolato, O. O.

PY - 2020

Y1 - 2020

N2 - Laser-produced tin plasmas are used for the generation of extreme ultraviolet (EUV) light for state-of-The-Art nanolithography. Currently, CO2-gas lasers operating at 10-micrometer wavelength are used to drive the EUV-emitting plasma but with further developments regarding their output power, solid-state lasers operating at shorter, mid-infrared wavelengths may present a viable alternative. Such novel laser systems may provide a significantly higher efficiency in converting electrical power to laser light. We use an extensive diagnostic toolset to characterize and understand the physics of solid-state-laser-driven plasma light sources at the atomic level.

AB - Laser-produced tin plasmas are used for the generation of extreme ultraviolet (EUV) light for state-of-The-Art nanolithography. Currently, CO2-gas lasers operating at 10-micrometer wavelength are used to drive the EUV-emitting plasma but with further developments regarding their output power, solid-state lasers operating at shorter, mid-infrared wavelengths may present a viable alternative. Such novel laser systems may provide a significantly higher efficiency in converting electrical power to laser light. We use an extensive diagnostic toolset to characterize and understand the physics of solid-state-laser-driven plasma light sources at the atomic level.

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M3 - Conference contribution

AN - SCOPUS:85102300252

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BT - Compact EUV and X-ray Light Sources 2020 (EUVXRAY)

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Y2 - 16 November 2020 through 20 November 2020

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Solid-state-laser-produced microdroplet-Tin plasma sources of extreme ultraviolet radiation

Abstract

Publication series

Conference

Bibliographical note

UN SDGs

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