Spectral-domain optical coherence reflectometric sensor for highly sensitive molecular detection

C. Joo, J.F. de Boer

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Abstract

We describe what we believe to be a novel use of spectral-domain optical coherence reflectometry (SD-OCR) for highly sensitive molecular detection in real time. The SD-OCR sensor allows identification of a sensor surface of interest in an OCR depth scan and monitoring the phase alteration due to molecular interaction at that surface with subnanometer optical thickness sensitivity. We present subfemtomole detection sensitivity for etching of SiO
Original languageEnglish
Pages (from-to)2426-2428
Number of pages3
JournalOptics Letters
Volume32
Issue number16
DOIs
Publication statusPublished - 2007

Bibliographical note

Spectral-domain optical coherence reflectometric sensor for highly sensitive molecular detection

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