Synopsis Highly charged tin ions are the sources of extreme ultraviolet (EUV) light at 13.5-nm wavelength in laser-produced transient plasmas for next-generation nanolithography. Generating this EUV light at the required power, reliability, and stability however presents a formidable task that combines industrial innovations with challenging scientific questions. We will present work on the spectroscopy of tin ions in and out of YAG-laserdriven plasma and present a surprising answer to the key question: what makes that light?
|Number of pages||1|
|Journal||Journal of Physics: Conference Series|
|Publication status||Published - 11 Jun 2020|
|Event||31st International Conference on Photonic, Electronic and Atomic Collisions, ICPEAC 2019 - Deauville, France|
Duration: 23 Jul 2019 → 30 Jul 2019