TY - JOUR
T1 - Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography
AU - Versolato, O.
AU - Bayerle, A.
AU - Bayraktar, M.
AU - Behnke, L.
AU - Bekker, H.
AU - Bouza, Z.
AU - Colgan, J.
AU - Crespo López-Urrutia, J. R.
AU - Deuzeman, M. J.
AU - Hoekstra, R.
AU - Kurilovich, D.
AU - Liu, B.
AU - Meijer, R.
AU - Neukirch, A.
AU - Poirier, L.
AU - Rai, S.
AU - Ryabtsev, A.
AU - Scheers, J.
AU - Schupp, R.
AU - Sheil, J.
AU - Torretti, F.
AU - Ubachs, W.
AU - Witte, S.
PY - 2020/6
Y1 - 2020/6
N2 - Synopsis Highly charged tin ions are the sources of extreme ultraviolet (EUV) light at 13.5-nm wavelength in laser-produced transient plasmas for next-generation nanolithography. Generating this EUV light at the required power, reliability, and stability however presents a formidable task that combines industrial innovations with challenging scientific questions. We will present work on the spectroscopy of tin ions in and out of YAG-laserdriven plasma and present a surprising answer to the key question: what makes that light?
AB - Synopsis Highly charged tin ions are the sources of extreme ultraviolet (EUV) light at 13.5-nm wavelength in laser-produced transient plasmas for next-generation nanolithography. Generating this EUV light at the required power, reliability, and stability however presents a formidable task that combines industrial innovations with challenging scientific questions. We will present work on the spectroscopy of tin ions in and out of YAG-laserdriven plasma and present a surprising answer to the key question: what makes that light?
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U2 - 10.1088/1742-6596/1412/19/192006
DO - 10.1088/1742-6596/1412/19/192006
M3 - Article
AN - SCOPUS:85086642813
SN - 1742-6588
VL - 1412
SP - 1
EP - 1
JO - Journal of Physics : Conference Series
JF - Journal of Physics : Conference Series
IS - 19
M1 - 192006
T2 - 31st International Conference on Photonic, Electronic and Atomic Collisions, ICPEAC 2019
Y2 - 23 July 2019 through 30 July 2019
ER -
