Spectroscopy of highly-charged Sn ions for extreme ultraviolet nanolithography

F. Torretti

Research output: PhD ThesisPhD-Thesis - Research and graduation internal

155 Downloads (Pure)
Original languageEnglish
QualificationPhD
Awarding Institution
  • Vrije Universiteit Amsterdam
Supervisors/Advisors
  • Ubachs, WMG, Supervisor
  • Hoekstra, Ronnie, Supervisor, External person
  • Versolato, Oscar, Co-supervisor
Award date19 Dec 2019
Print ISBNs9789492323309
Publication statusPublished - 2019

Keywords

  • spectroscopy
  • laser-produced plasma
  • lithography
  • extreme ultraviolet

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