Abstract
We experimentally investigate the speed of fragments produced by ligament breakup in the laser-induced deformation of tin microdroplets into axisymmetric sheets. The experiments were carried out covering a wide range of droplet diameters and laser-pulse energies. In addition to fragments produced by end-pinching, we also observe fragments shed via Rayleigh-Plateau breakup of long ligaments at late times. A double-frame backlit camera was used to obtain the speeds of the fragments uf and the time of their detachment td. We show that by normalizing uf to the initial expansion speed of the sheet Ṙ0, all data collapse onto a single, universal curve that is a function of the dimensionless time td/τc only, where τc is the capillary time. This universal curve is explicitly independent of the droplet's Weber number. The collapse of uf is supported by energy conservation arguments. Our findings enable the prediction of the instantaneous speed and position of the fragments shed from liquid tin targets used in state-of-the-art extreme ultraviolet nanolithography, facilitating the design of effective mitigation strategies against microparticulate debris.
Original language | English |
---|---|
Article number | 083601 |
Pages (from-to) | 1-16 |
Number of pages | 16 |
Journal | Physical Review Fluids |
Volume | 7 |
Issue number | 8 |
Early online date | 29 Aug 2022 |
DOIs | |
Publication status | Published - Aug 2022 |
Bibliographical note
Funding Information:We thank Alexander Klein for providing the double-frame camera utilized in this study. This work was carried out at the Advanced Research Center for Nanolithography (ARCNL), a public-private partnership of the University of Amsterdam (UvA), the Vrije Universiteit Amsterdam (VU), the Dutch Research Council (NWO), and the semiconductor equipment manufacturer ASML. This project received funding from the European Research Council (ERC) through Starting Grant No. 802648 and is part of the Vidi research program with Project No. 15697, which is financed by NWO.
Publisher Copyright:
© 2022 authors. Published by the American Physical Society.
Funding
We thank Alexander Klein for providing the double-frame camera utilized in this study. This work was carried out at the Advanced Research Center for Nanolithography (ARCNL), a public-private partnership of the University of Amsterdam (UvA), the Vrije Universiteit Amsterdam (VU), the Dutch Research Council (NWO), and the semiconductor equipment manufacturer ASML. This project received funding from the European Research Council (ERC) through Starting Grant No. 802648 and is part of the Vidi research program with Project No. 15697, which is financed by NWO.
Funders | Funder number |
---|---|
Horizon 2020 Framework Programme | 802648 |
European Research Council | 15697 |
Nederlandse Organisatie voor Wetenschappelijk Onderzoek |