Abstract
Microscopy with coherent extreme-ultraviolet (EUV) and soft-X-ray radiation is a promising diagnostic tool for nanoscience. High-harmonic generation (HHG) sources are becoming a mature table-top source for EUV and soft-X-ray radiation. HHG sources naturally produce broad EUV and soft-X-ray spectra, making them intrinsically suited for spectrally-resolved microscopy. This is particularly interesting because many materials possess unique absorption characteristics in this short-wavelength range. However, focusing and shaping polychromatic EUV radiation for microscopy experiments remains challenging due to the fact that most elements across the periodic table exhibit high absorption and low refractive index contrast, which makes manufacturing good refractive optics such as lenses very difficult. A promising technique capable of simultaneous wavefront sensing and quantitative phase contrast microscopy is ptychography [1], as the large amount of redundant information available in ptychography allows for polychromatic reconstructions with monochromatic detectors [2]. This is particularly useful for imaging experiments with HHG sources, where polychromatic operation offers largely increased flux. Studies have indicated that a ptychography reconstruction benefits from structured illumination probes [3] - [5].
Original language | English |
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Title of host publication | 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference (CLEO/Europe-EQEC) |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
ISBN (Electronic) | 9781665418768 |
ISBN (Print) | 9781665448048 |
DOIs | |
Publication status | Published - 30 Sept 2021 |
Event | 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2021 - Munich, Germany Duration: 21 Jun 2021 → 25 Jun 2021 |
Conference
Conference | 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2021 |
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Country/Territory | Germany |
City | Munich |
Period | 21/06/21 → 25/06/21 |
Bibliographical note
Publisher Copyright:© 2021 IEEE.
Funding
Funders | Funder number |
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Horizon 2020 Framework Programme | 637476 |