@inproceedings{1eb6d057e5004981b9b7fcde780a373c,
title = "Theoretical and experimental demonstration of a state-of-the-art dark-field holographic microscope for advanced semiconductor metrology",
abstract = "We describe a dark-field holographic microscope, that aims to surpass metrology requirements with novel phase-DBO measurements. We present parameters that improve overlay (OV) metrology and test the validation of our analysis with an experimental demonstration.",
author = "C. Messinis and Tenner, {V. T.} and {de Boer}, {J. F.} and S. Witte and {den Boef}, {A. J.}",
year = "2019",
month = jun,
doi = "10.1364/COSI.2019.CM1A.CTu4C.4",
language = "English",
series = "Optics InfoBase Conference Papers",
publisher = "OSA - The Optical Society",
booktitle = "Imaging and Applied Optics 2019 (COSI, IS, MATH, pcAOP)",
note = "Computational Optical Sensing and Imaging, COSI 2019 ; Conference date: 24-06-2019 Through 27-06-2019",
}