TI-REX: a 5->20ns Temporally Shapeable and 1.4-4.4µm Wavelength-tunable Source for Nanolithography

Zeudi Mazzotta; Jan Mathijssen; Oscar Versolato; Kjeld Eikema; Stefan Witte

TI-REX: a 5->20ns Temporally Shapeable and 1.4-4.4µm Wavelength-tunable Source for Nanolithography

Zeudi Mazzotta^*, Jan Mathijssen, Oscar Versolato, Kjeld Eikema, Stefan Witte

^*Corresponding author for this work

Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

Abstract

TI-REX is a self-seeded nanosecond (5-20ns) parametric amplifier with wide wavelength tunability (1.4-4.4µm) and high-resolution (0.25ns) temporal shaping capability. It enables systematic studies on laser produced plasmas and the wavelength-dependence of extreme-ultraviolet generation efficiency.

Original language	English
Title of host publication	High Intensity Lasers and High Field Phenomena (HILAS 2022)
Subtitle of host publication	Proceedings Optica High-brightness Sources and Light-driven Interactions Congress 2022
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Electronic)	9781557528209
Publication status	Published - 2022
Event	High Intensity Lasers and High Field Phenomena, HILAS 2022 - Budapest, Hungary Duration: 21 Mar 2022 → 25 Mar 2022

Publication series

Name	Optics InfoBase Conference Papers

Conference

Conference	High Intensity Lasers and High Field Phenomena, HILAS 2022
Country/Territory	Hungary
City	Budapest
Period	21/03/22 → 25/03/22

Bibliographical note

Publisher Copyright:
© Optica 2022, © 2022 The Author(s)

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https://opg.optica.org/abstract.cfm?uri=HILAS-2022-HW2B.2

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Mazzotta, Z., Mathijssen, J., Versolato, O., Eikema, K., & Witte, S. (2022). TI-REX: a 5->20ns Temporally Shapeable and 1.4-4.4µm Wavelength-tunable Source for Nanolithography. In High Intensity Lasers and High Field Phenomena (HILAS 2022): Proceedings Optica High-brightness Sources and Light-driven Interactions Congress 2022 Article HW2B.2 (Optics InfoBase Conference Papers). Optica Publishing Group (formerly OSA). https://opg.optica.org/abstract.cfm?uri=HILAS-2022-HW2B.2

Mazzotta, Zeudi ; Mathijssen, Jan ; Versolato, Oscar et al. / TI-REX: a 5->20ns Temporally Shapeable and 1.4-4.4µm Wavelength-tunable Source for Nanolithography. High Intensity Lasers and High Field Phenomena (HILAS 2022): Proceedings Optica High-brightness Sources and Light-driven Interactions Congress 2022. Optica Publishing Group (formerly OSA), 2022. (Optics InfoBase Conference Papers).

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title = "TI-REX: a 5->20ns Temporally Shapeable and 1.4-4.4µm Wavelength-tunable Source for Nanolithography",

abstract = "TI-REX is a self-seeded nanosecond (5-20ns) parametric amplifier with wide wavelength tunability (1.4-4.4µm) and high-resolution (0.25ns) temporal shaping capability. It enables systematic studies on laser produced plasmas and the wavelength-dependence of extreme-ultraviolet generation efficiency.",

author = "Zeudi Mazzotta and Jan Mathijssen and Oscar Versolato and Kjeld Eikema and Stefan Witte",

note = "Publisher Copyright: {\textcopyright} Optica 2022, {\textcopyright} 2022 The Author(s); High Intensity Lasers and High Field Phenomena, HILAS 2022 ; Conference date: 21-03-2022 Through 25-03-2022",

year = "2022",

language = "English",

series = "Optics InfoBase Conference Papers",

publisher = "Optica Publishing Group (formerly OSA)",

booktitle = "High Intensity Lasers and High Field Phenomena (HILAS 2022)",

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Mazzotta, Z, Mathijssen, J, Versolato, O , Eikema, K & Witte, S 2022, TI-REX: a 5->20ns Temporally Shapeable and 1.4-4.4µm Wavelength-tunable Source for Nanolithography. in High Intensity Lasers and High Field Phenomena (HILAS 2022): Proceedings Optica High-brightness Sources and Light-driven Interactions Congress 2022., HW2B.2, Optics InfoBase Conference Papers, Optica Publishing Group (formerly OSA), High Intensity Lasers and High Field Phenomena, HILAS 2022, Budapest, Hungary, 21/03/22. <https://opg.optica.org/abstract.cfm?uri=HILAS-2022-HW2B.2>

TI-REX: a 5->20ns Temporally Shapeable and 1.4-4.4µm Wavelength-tunable Source for Nanolithography. / Mazzotta, Zeudi; Mathijssen, Jan; Versolato, Oscar et al.
High Intensity Lasers and High Field Phenomena (HILAS 2022): Proceedings Optica High-brightness Sources and Light-driven Interactions Congress 2022. Optica Publishing Group (formerly OSA), 2022. HW2B.2 (Optics InfoBase Conference Papers).

Research output: Chapter in Book / Report / Conference proceeding › Conference contribution › Academic › peer-review

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AU - Mathijssen, Jan

AU - Versolato, Oscar

AU - Eikema, Kjeld

AU - Witte, Stefan

PY - 2022

Y1 - 2022

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AB - TI-REX is a self-seeded nanosecond (5-20ns) parametric amplifier with wide wavelength tunability (1.4-4.4µm) and high-resolution (0.25ns) temporal shaping capability. It enables systematic studies on laser produced plasmas and the wavelength-dependence of extreme-ultraviolet generation efficiency.

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T3 - Optics InfoBase Conference Papers

BT - High Intensity Lasers and High Field Phenomena (HILAS 2022)

PB - Optica Publishing Group (formerly OSA)

T2 - High Intensity Lasers and High Field Phenomena, HILAS 2022

Y2 - 21 March 2022 through 25 March 2022

ER -

Mazzotta Z, Mathijssen J, Versolato O , Eikema K , Witte S. TI-REX: a 5->20ns Temporally Shapeable and 1.4-4.4µm Wavelength-tunable Source for Nanolithography. In High Intensity Lasers and High Field Phenomena (HILAS 2022): Proceedings Optica High-brightness Sources and Light-driven Interactions Congress 2022. Optica Publishing Group (formerly OSA). 2022. HW2B.2. (Optics InfoBase Conference Papers). Epub 2022 Mar 21.

TI-REX: a 5->20ns Temporally Shapeable and 1.4-4.4µm Wavelength-tunable Source for Nanolithography

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