TY - GEN
T1 - TI-REX: A tunable infrared laser for experiments in nanolithography
AU - Mazzotta, Zeudi
AU - Mathijssen, Jan
AU - Eikema, Kjeld
AU - Versolato, Oscar
AU - Witte, Stefan
PY - 2021
Y1 - 2021
N2 - TI-REX is a nanosecond mid-IR light source, with spectral tunability from 1.45 to 4.5m, pulse energy up to 100mJ, and accurate temporal pulse shape control, and a great future tool for plasma-based extreme-ultraviolet generation studies.
AB - TI-REX is a nanosecond mid-IR light source, with spectral tunability from 1.45 to 4.5m, pulse energy up to 100mJ, and accurate temporal pulse shape control, and a great future tool for plasma-based extreme-ultraviolet generation studies.
UR - http://www.scopus.com/inward/record.url?scp=85120424673&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85120424673&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85120424673
T3 - Optics InfoBase Conference Papers
BT - The European Conference on Lasers and Electro-Optics 2021 (CLEO)
PB - OSA - The Optical Society
T2 - 2021 European Conference on Lasers and Electro-Optics, CLEO/Europe 2021
Y2 - 21 June 2021 through 25 June 2021
ER -
