TI-REX: A tunable infrared laser for experiments in nanolithography

Research output: Chapter in Book / Report / Conference proceedingConference contributionAcademicpeer-review

Abstract

TI-REX is a nanosecond mid-IR light source, with spectral tunability from 1.45 to 4.5m, pulse energy up to 100mJ, and accurate temporal pulse shape control, and a great future tool for plasma-based extreme-ultraviolet generation studies.
Original languageEnglish
Title of host publicationThe European Conference on Lasers and Electro-Optics 2021 (CLEO)
PublisherOSA - The Optical Society
ISBN (Print)9781665418768
Publication statusPublished - Jun 2021
Event2021 European Conference on Lasers and Electro-Optics, CLEO/Europe 2021 - Virtual, Online, Germany
Duration: 21 Jun 202125 Jun 2021

Publication series

NameOptics InfoBase Conference Papers

Conference

Conference2021 European Conference on Lasers and Electro-Optics, CLEO/Europe 2021
Country/TerritoryGermany
CityVirtual, Online
Period21/06/2125/06/21

Fingerprint

Dive into the research topics of 'TI-REX: A tunable infrared laser for experiments in nanolithography'. Together they form a unique fingerprint.

Cite this