Wafer-scale thin encapsulated two-dimensional nanochannels and its application toward visualization of single molecules

T.H. Hoang, H D Tong, I.M.J. Segers-Nolten, N R Tas, V Subramaniam, M. C. Elwenspoek

    Research output: Contribution to JournalArticleAcademicpeer-review

    Abstract

    We present a new and simple approach to fabricate wafer-scale, thin encapsulated, two-dimensional nanochannels by using conventional surface-micromachining technology and thin-film evaporation. The key steps to the realization of two-dimensional nanochannels are a fine etching of a sacrificial layer to create underetching spaces at the nanometer regime, and an accurate thin-film evaporation for encapsulation. Well-defined cross-sectional, encapsulated nanochannel arrays with dimensions as small as 20 nm in both width and height have been realized at the wafer-scale. The fabricated nanochannels with a channel length of 10mm have been used as a suitable fluidic platform for confining a solution containing nanomolar concentrations of Alexa fluorescent molecules. Initial results toward visualization of single Alexa molecules in the confined solution are reported.

    Original languageEnglish
    Pages (from-to)455-9
    Number of pages5
    JournalJournal of Colloid and Interface Science
    Volume367
    Issue number1
    DOIs
    Publication statusPublished - 1 Feb 2012

    Keywords

    • Fluorescent Dyes
    • Hydrazines
    • Microscopy, Fluorescence
    • Microtechnology
    • Nanostructures
    • Journal Article
    • Research Support, Non-U.S. Gov't

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