Wafer-scale thin encapsulated two-dimensional nanochannels and its application toward visualization of single molecules

T.H. Hoang, H D Tong, I.M.J. Segers-Nolten, N R Tas, V Subramaniam, M. C. Elwenspoek

Research output: Contribution to JournalArticleAcademicpeer-review

Abstract

We present a new and simple approach to fabricate wafer-scale, thin encapsulated, two-dimensional nanochannels by using conventional surface-micromachining technology and thin-film evaporation. The key steps to the realization of two-dimensional nanochannels are a fine etching of a sacrificial layer to create underetching spaces at the nanometer regime, and an accurate thin-film evaporation for encapsulation. Well-defined cross-sectional, encapsulated nanochannel arrays with dimensions as small as 20 nm in both width and height have been realized at the wafer-scale. The fabricated nanochannels with a channel length of 10mm have been used as a suitable fluidic platform for confining a solution containing nanomolar concentrations of Alexa fluorescent molecules. Initial results toward visualization of single Alexa molecules in the confined solution are reported.

Original languageEnglish
Pages (from-to)455-9
Number of pages5
JournalJournal of Colloid and Interface Science
Volume367
Issue number1
DOIs
Publication statusPublished - 1 Feb 2012

Keywords

  • Fluorescent Dyes
  • Hydrazines
  • Microscopy, Fluorescence
  • Microtechnology
  • Nanostructures
  • Journal Article
  • Research Support, Non-U.S. Gov't

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